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Paper Abstract and Keywords
Presentation 2023-01-20 15:10
Evaluation of current-voltage characteristics of STJ detectors using membrane
Tsuyoshi Noguchi, Taiga Shibasaki (Saitama Univ.), Go Fujii, Shigetomo Shiki, Takahiro Kikuchi (AIST), Tohru Taino (Saitama Univ.) SCE2022-17
Abstract (in Japanese) (See Japanese page) 
(in English) Superconducting tunnel junction (STJ) detectors can theoretically achieve several ten times higher energy resolution than conventional semiconductor detectors and are expected to be applied to X-ray fluorescence analysis of trace light elements in next-generation power semiconductors such as SiC and GaN. However, since current STJs are integrated on Si substrate, signals generated by high-energy X-rays absorbed in the Si substrate overlap with characteristic X-ray peaks of the trace light elements, making trace light element analysis difficult. In order to prevent X-ray absorption directly under the STJs, we proposed a new structure in which the STJs are integrated on a freestanding membrane by removing the Si substrate directly under the STJs. In this study, we evaluated leakage current and fabrication yield of the new structure by current-voltage characteristics.
Keyword (in Japanese) (See Japanese page) 
(in English) Superconducting X-ray detector / Superconducting tunnel junction detector / STJ detector / Light element analysis / Membrane / Current-voltage characteristics / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 347, SCE2022-17, pp. 23-26, Jan. 2023.
Paper # SCE2022-17 
Date of Issue 2023-01-13 (SCE) 
ISSN Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SCE  
Conference Date 2023-01-20 - 2023-01-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Superconducting Electronics 
Paper Information
Registration To SCE 
Conference Code 2023-01-SCE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of current-voltage characteristics of STJ detectors using membrane 
Sub Title (in English)  
Keyword(1) Superconducting X-ray detector  
Keyword(2) Superconducting tunnel junction detector  
Keyword(3) STJ detector  
Keyword(4) Light element analysis  
Keyword(5) Membrane  
Keyword(6) Current-voltage characteristics  
Keyword(7)  
Keyword(8)  
1st Author's Name Tsuyoshi Noguchi  
1st Author's Affiliation Saitama University (Saitama Univ.)
2nd Author's Name Taiga Shibasaki  
2nd Author's Affiliation Saitama University (Saitama Univ.)
3rd Author's Name Go Fujii  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Shigetomo Shiki  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Takahiro Kikuchi  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Tohru Taino  
6th Author's Affiliation Saitama University (Saitama Univ.)
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Speaker Author-1 
Date Time 2023-01-20 15:10:00 
Presentation Time 25 minutes 
Registration for SCE 
Paper # SCE2022-17 
Volume (vol) vol.122 
Number (no) no.347 
Page pp.23-26 
#Pages
Date of Issue 2023-01-13 (SCE) 


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