Paper Abstract and Keywords |
Presentation |
2023-01-20 15:10
Evaluation of current-voltage characteristics of STJ detectors using membrane Tsuyoshi Noguchi (Saitama Univ.), Go Fujii, Shigetomo Shiki (AIST), Tohru Taino, Taiga Shibasaki (Saitama Univ.), Takahiro Kikuchi (AIST) SCE2022-17 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Superconducting tunnel junction (STJ) detectors can theoretically achieve several ten times higher energy resolution than conventional semiconductor detectors and are expected to be applied to X-ray fluorescence analysis of trace light elements in next-generation power semiconductors such as SiC and GaN. However, since current STJs are integrated on Si substrate, signals generated by high-energy X-rays absorbed in the Si substrate overlap with characteristic X-ray peaks of the trace light elements, making trace light element analysis difficult. In order to prevent X-ray absorption directly under the STJs, we proposed a new structure in which the STJs are integrated on a freestanding membrane by removing the Si substrate directly under the STJs. In this study, we evaluated leakage current and fabrication yield of the new structure by current-voltage characteristics. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Superconducting X-ray detector / Superconducting tunnel junction detector / STJ detector / Light element analysis / Membrane / Current-voltage characteristics / / |
Reference Info. |
IEICE Tech. Rep., vol. 122, no. 347, SCE2022-17, pp. 23-26, Jan. 2023. |
Paper # |
SCE2022-17 |
Date of Issue |
2023-01-13 (SCE) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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SCE2022-17 |
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