Paper Abstract and Keywords |
Presentation |
2023-01-20 15:10
Evaluation of current-voltage characteristics of STJ detectors using membrane Tsuyoshi Noguchi, Taiga Shibasaki (Saitama Univ.), Go Fujii, Shigetomo Shiki, Takahiro Kikuchi (AIST), Tohru Taino (Saitama Univ.) SCE2022-17 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Superconducting tunnel junction (STJ) detectors can theoretically achieve several ten times higher energy resolution than conventional semiconductor detectors and are expected to be applied to X-ray fluorescence analysis of trace light elements in next-generation power semiconductors such as SiC and GaN. However, since current STJs are integrated on Si substrate, signals generated by high-energy X-rays absorbed in the Si substrate overlap with characteristic X-ray peaks of the trace light elements, making trace light element analysis difficult. In order to prevent X-ray absorption directly under the STJs, we proposed a new structure in which the STJs are integrated on a freestanding membrane by removing the Si substrate directly under the STJs. In this study, we evaluated leakage current and fabrication yield of the new structure by current-voltage characteristics. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Superconducting X-ray detector / Superconducting tunnel junction detector / STJ detector / Light element analysis / Membrane / Current-voltage characteristics / / |
Reference Info. |
IEICE Tech. Rep., vol. 122, no. 347, SCE2022-17, pp. 23-26, Jan. 2023. |
Paper # |
SCE2022-17 |
Date of Issue |
2023-01-13 (SCE) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SCE2022-17 |
Conference Information |
Committee |
SCE |
Conference Date |
2023-01-20 - 2023-01-20 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Superconducting Electronics |
Paper Information |
Registration To |
SCE |
Conference Code |
2023-01-SCE |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Evaluation of current-voltage characteristics of STJ detectors using membrane |
Sub Title (in English) |
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Keyword(1) |
Superconducting X-ray detector |
Keyword(2) |
Superconducting tunnel junction detector |
Keyword(3) |
STJ detector |
Keyword(4) |
Light element analysis |
Keyword(5) |
Membrane |
Keyword(6) |
Current-voltage characteristics |
Keyword(7) |
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1st Author's Name |
Tsuyoshi Noguchi |
1st Author's Affiliation |
Saitama University (Saitama Univ.) |
2nd Author's Name |
Taiga Shibasaki |
2nd Author's Affiliation |
Saitama University (Saitama Univ.) |
3rd Author's Name |
Go Fujii |
3rd Author's Affiliation |
National Institute of Advanced Industrial Science and Technology (AIST) |
4th Author's Name |
Shigetomo Shiki |
4th Author's Affiliation |
National Institute of Advanced Industrial Science and Technology (AIST) |
5th Author's Name |
Takahiro Kikuchi |
5th Author's Affiliation |
National Institute of Advanced Industrial Science and Technology (AIST) |
6th Author's Name |
Tohru Taino |
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Saitama University (Saitama Univ.) |
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Speaker |
Author-1 |
Date Time |
2023-01-20 15:10:00 |
Presentation Time |
25 minutes |
Registration for |
SCE |
Paper # |
SCE2022-17 |
Volume (vol) |
vol.122 |
Number (no) |
no.347 |
Page |
pp.23-26 |
#Pages |
4 |
Date of Issue |
2023-01-13 (SCE) |