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| Presentation | 2023-01-27 15:25 Low - pressure CVD of hexagonal BN thin films at high temperatures Taiki Oishi, Taira Watanabe, Yuki Tanaka, Katsumi Masuda, Riku Yoshioka, Kirari Masuda, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.)  EID2022-8 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | To further improve quality of hexagonal boron nitride (h-BN) thin films grown on c-plane sapphire by a low - pressure chemical vapor deposition (CVD) method with BCl₃ and NH₃, we have optimized the growth conditions at higher growth temperatures, Tg, than before. At Tg = 1300 ℃, optimizing the NH₃ flow rate significantly improved the luminescence property compared to those grow at 1200 ℃. At Tg = 1400 ℃, the luminescence property was most improved at growth pressure, Pg = 7.5 kPa, which is lower than the optimal Pg of 15 kPa at 1200 and 1300 ℃. However, the improvement of film quality was not achieved at Tg = 1400 ℃. At even higher Tg, the growth conditions need to be further investigated. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | hexagonal boron nitride / CVD / thin film / excitonic luminescence / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 122, no. 366, EID2022-8, pp. 17-20, Jan. 2023. | |
| Paper # | EID2022-8 | |
| Date of Issue | 2023-01-19 (EID) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EID2022-8 |
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| Conference Information | |
| Committee | ITE-IDY IEIJ-SSL EID SID-JC IEE-EDD |
| Conference Date | 2023-01-26 - 2023-01-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online (Zoom) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | EID |
| Conference Code | 2023-01-IDY-SSL-EID-JC-EDD |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low - pressure CVD of hexagonal BN thin films at high temperatures |
| Sub Title (in English) | |
| Keyword(1) | hexagonal boron nitride |
| Keyword(2) | CVD |
| Keyword(3) | thin film |
| Keyword(4) | excitonic luminescence |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Taiki Oishi |
| 1st Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 2nd Author's Name | Taira Watanabe |
| 2nd Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 3rd Author's Name | Yuki Tanaka |
| 3rd Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 4th Author's Name | Katsumi Masuda |
| 4th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 5th Author's Name | Riku Yoshioka |
| 5th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 6th Author's Name | Kirari Masuda |
| 6th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 7th Author's Name | Hiroko Kominami |
| 7th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
| 8th Author's Name | Kazuhiko Hara |
| 8th Author's Affiliation | Shizuoka University (Shizuoka Univ.) |
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| Speaker | Author-1 |
| Date Time | 2023-01-27 15:25:00 |
| Presentation Time | 10 minutes |
| Registration for | EID |
| Paper # | EID2022-8 |
| Volume (vol) | vol.122 |
| Number (no) | no.366 |
| Page | pp.17-20 |
| #Pages | 4 |
| Date of Issue | 2023-01-19 (EID) |
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