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Paper Abstract and Keywords
Presentation 2023-01-27 15:25
Low - pressure CVD of hexagonal BN thin films at high temperatures
Taiki Oishi, Taira Watanabe, Yuki Tanaka, Katsumi Masuda, Riku Yoshioka, Kirari Masuda, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.) EID2022-8
Abstract (in Japanese) (See Japanese page) 
(in English) To further improve quality of hexagonal boron nitride (h-BN) thin films grown on c-plane sapphire by a low - pressure chemical vapor deposition (CVD) method with BCl₃ and NH₃, we have optimized the growth conditions at higher growth temperatures, Tg, than before. At Tg = 1300 ℃, optimizing the NH₃ flow rate significantly improved the luminescence property compared to those grow at 1200 ℃. At Tg = 1400 ℃, the luminescence property was most improved at growth pressure, Pg = 7.5 kPa, which is lower than the optimal Pg of 15 kPa at 1200 and 1300 ℃. However, the improvement of film quality was not achieved at Tg = 1400 ℃. At even higher Tg, the growth conditions need to be further investigated.
Keyword (in Japanese) (See Japanese page) 
(in English) hexagonal boron nitride / CVD / thin film / excitonic luminescence / / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 366, EID2022-8, pp. 17-20, Jan. 2023.
Paper # EID2022-8 
Date of Issue 2023-01-19 (EID) 
ISSN Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee ITE-IDY IEIJ-SSL EID SID-JC IEE-EDD  
Conference Date 2023-01-26 - 2023-01-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Online (Zoom) 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EID 
Conference Code 2023-01-IDY-SSL-EID-JC-EDD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Low - pressure CVD of hexagonal BN thin films at high temperatures 
Sub Title (in English)  
Keyword(1) hexagonal boron nitride  
Keyword(2) CVD  
Keyword(3) thin film  
Keyword(4) excitonic luminescence  
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1st Author's Name Taiki Oishi  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Taira Watanabe  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Yuki Tanaka  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Katsumi Masuda  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Riku Yoshioka  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
6th Author's Name Kirari Masuda  
6th Author's Affiliation Shizuoka University (Shizuoka Univ.)
7th Author's Name Hiroko Kominami  
7th Author's Affiliation Shizuoka University (Shizuoka Univ.)
8th Author's Name Kazuhiko Hara  
8th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2023-01-27 15:25:00 
Presentation Time 10 minutes 
Registration for EID 
Paper # EID2022-8 
Volume (vol) vol.122 
Number (no) no.366 
Page pp.17-20 
#Pages 4 
Date of Issue 2023-01-19 (EID) 

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