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| Paper Abstract and Keywords | ||
| Presentation | 2023-03-01 15:45 A Feature Vector Considering Characteristics of Optical System for Lithography Hotspot Detection Masahiro Yamamoto, Masato Inagi, Shinobu Nagayama (HCU)  VLD2022-81 HWS2022-52 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 122, no. 402, VLD2022-81, pp. 49-54, March 2023. | |
| Paper # | VLD2022-81 | |
| Date of Issue | 2023-02-22 (VLD, HWS) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | VLD2022-81 HWS2022-52 |
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| Conference Information | |
| Committee | HWS VLD |
| Conference Date | 2023-03-01 - 2023-03-04 |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | VLD |
| Conference Code | 2023-03-HWS-VLD |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Feature Vector Considering Characteristics of Optical System for Lithography Hotspot Detection |
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| 1st Author's Name | Masahiro Yamamoto |
| 1st Author's Affiliation | Hiroshima City University (HCU) |
| 2nd Author's Name | Masato Inagi |
| 2nd Author's Affiliation | Hiroshima City University (HCU) |
| 3rd Author's Name | Shinobu Nagayama |
| 3rd Author's Affiliation | Hiroshima City University (HCU) |
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| Speaker | Author-1 |
| Date Time | 2023-03-01 15:45:00 |
| Presentation Time | 25 minutes |
| Registration for | VLD |
| Paper # | VLD2022-81, HWS2022-52 |
| Volume (vol) | vol.122 |
| Number (no) | no.402(VLD), no.403(HWS) |
| Page | pp.49-54 |
| #Pages | 6 |
| Date of Issue | 2023-02-22 (VLD, HWS) |
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