| Conference Information |
| Committee |
ICD |
| Conference Date |
2023-04-10 - 2023-04-11 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
|
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
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| Paper Information |
| Registration To |
ICD |
| Conference Code |
2023-04-ICD |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
A c-axis aligned crystalline IGZO FET and a 0.06-um2 HfO2-based capacitor 1T1C FeRAM with high voltage tolerance and 10-ns write time |
| Sub Title (in English) |
|
| Keyword(1) |
IGZO |
| Keyword(2) |
HZO |
| Keyword(3) |
damascene |
| Keyword(4) |
BEOL |
| Keyword(5) |
1T1C |
| Keyword(6) |
|
| Keyword(7) |
|
| Keyword(8) |
|
| 1st Author's Name |
Masami Endo |
| 1st Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 2nd Author's Name |
Numata Shiyuu |
| 2nd Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 3rd Author's Name |
Ohshima Kazuaki |
| 3rd Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 4th Author's Name |
Egi Yuji |
| 4th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 5th Author's Name |
Isaka Fumito |
| 5th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 6th Author's Name |
Ohno Toshikazu |
| 6th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 7th Author's Name |
Tezuka Sachiaki |
| 7th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 8th Author's Name |
Hamada Toshiki |
| 8th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 9th Author's Name |
Furutani Kazuma |
| 9th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 10th Author's Name |
Tsuda Kazuki |
| 10th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 11th Author's Name |
Matsuzaki Takanori |
| 11th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 12th Author's Name |
Onuki Tatsuya |
| 12th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 13th Author's Name |
Murakawa Tsutomu |
| 13th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 14th Author's Name |
Kunitake Hitoshi |
| 14th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 15th Author's Name |
Masaharu Kobayashi |
| 15th Author's Affiliation |
The University of Tokyo (The Univ. of Tokyo) |
| 16th Author's Name |
Yamazaki Shunpei |
| 16th Author's Affiliation |
Semiconductor Energy Laboratory Co., Ltd. (SEL) |
| 17th Author's Name |
|
| 17th Author's Affiliation |
() |
| 18th Author's Name |
|
| 18th Author's Affiliation |
() |
| 19th Author's Name |
|
| 19th Author's Affiliation |
() |
| 20th Author's Name |
|
| 20th Author's Affiliation |
() |
| Speaker |
Author-1 |
| Date Time |
2023-04-10 09:30:00 |
| Presentation Time |
25 minutes |
| Registration for |
ICD |
| Paper # |
|
| Volume (vol) |
vol.123 |
| Number (no) |
no.1 |
| Page |
|
| #Pages |
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| Date of Issue |
|