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| Presentation | 2023-05-19 15:30 Fine-Defect Discrimination on Dielectric Surface Using Optical Linear Discrimination Filter -- Filter Design Algorithm for Measurement of Weak Scattered Light -- Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui (Kitami Inst. Tech.)  EMT2023-6 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Various optical measurement methods have been proposed to rapidly discriminate convexity or concavity of the defect on the dielectric surface with high accuracy. However, it is difficult to accurately discriminate the defects whose sizes are comparable to the illumination wavelength owing to the diffraction limit. To date, we have designed an optical filter by applying Fisher’s linear discriminant analysis, which can discriminate the defect by comparing the light intensity after passing through the filter. However, the transmittance of this filter is considerably low, and it is not for practical use. In this study, we propose a new filter-design algorithm considering the filter transmittance. We evaluate the transmitted intensity of the designed filter, and compare with that of the conventional filter. Scattered fields from the defect are also analyzed to investigate the discrimination accuracy for each defect shape. |
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| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | optical measurement / inverse-scattering analysis / computer-generated hologram / linear discriminant analysis / boundary element method / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 123, no. 40, EMT2023-6, pp. 27-32, May 2023. | |
| Paper # | EMT2023-6 | |
| Date of Issue | 2023-05-12 (EMT) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EMT2023-6 |
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| Conference Information | |
| Committee | EMT IEE-EMT |
| Conference Date | 2023-05-19 - 2023-05-19 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Information Technology R & D Center, MITSUBISHI Electric Corp. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Electromagnetic Theory, etc. |
| Paper Information | |
| Registration To | EMT |
| Conference Code | 2023-05-EMT-EMT |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fine-Defect Discrimination on Dielectric Surface Using Optical Linear Discrimination Filter |
| Sub Title (in English) | Filter Design Algorithm for Measurement of Weak Scattered Light |
| Keyword(1) | optical measurement |
| Keyword(2) | inverse-scattering analysis |
| Keyword(3) | computer-generated hologram |
| Keyword(4) | linear discriminant analysis |
| Keyword(5) | boundary element method |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shingo Shimada |
| 1st Author's Affiliation | Kitami Institute of Technology (Kitami Inst. Tech.) |
| 2nd Author's Name | Jun-ichiro Sugisaka |
| 2nd Author's Affiliation | Kitami Institute of Technology (Kitami Inst. Tech.) |
| 3rd Author's Name | Koichi Hirayama |
| 3rd Author's Affiliation | Kitami Institute of Technology (Kitami Inst. Tech.) |
| 4th Author's Name | Takashi Yasui |
| 4th Author's Affiliation | Kitami Institute of Technology (Kitami Inst. Tech.) |
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| Speaker | Author-1 |
| Date Time | 2023-05-19 15:30:00 |
| Presentation Time | 25 minutes |
| Registration for | EMT |
| Paper # | EMT2023-6 |
| Volume (vol) | vol.123 |
| Number (no) | no.40 |
| Page | pp.27-32 |
| #Pages | 6 |
| Date of Issue | 2023-05-12 (EMT) |
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