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Paper Abstract and Keywords
Presentation 2023-05-19 15:30
Fine-Defect Discrimination on Dielectric Surface Using Optical Linear Discrimination Filter -- Filter Design Algorithm for Measurement of Weak Scattered Light --
Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui (Kitami Inst. Tech.) EMT2023-6
Abstract (in Japanese) (See Japanese page) 
(in English) Various optical measurement methods have been proposed to rapidly discriminate convexity or concavity of the defect on the dielectric surface with high accuracy. However, it is difficult to accurately discriminate the defects whose sizes are comparable to the illumination wavelength owing to the diffraction limit. To date, we have designed an optical filter by applying Fisher’s linear discriminant analysis, which can discriminate the defect by comparing the light intensity after passing through the filter. However, the transmittance of this filter is considerably low, and it is not for practical use. In this study, we propose a
new filter-design algorithm considering the filter transmittance. We evaluate the transmitted intensity of the designed filter, and compare with that of the conventional filter. Scattered fields from the defect are also analyzed to investigate the discrimination accuracy for each defect shape.
Keyword (in Japanese) (See Japanese page) 
(in English) optical measurement / inverse-scattering analysis / computer-generated hologram / linear discriminant analysis / boundary element method / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 40, EMT2023-6, pp. 27-32, May 2023.
Paper # EMT2023-6 
Date of Issue 2023-05-12 (EMT) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMT2023-6

Conference Information
Committee EMT IEE-EMT  
Conference Date 2023-05-19 - 2023-05-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Information Technology R & D Center, MITSUBISHI Electric Corp. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Electromagnetic Theory, etc. 
Paper Information
Registration To EMT 
Conference Code 2023-05-EMT-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fine-Defect Discrimination on Dielectric Surface Using Optical Linear Discrimination Filter 
Sub Title (in English) Filter Design Algorithm for Measurement of Weak Scattered Light 
Keyword(1) optical measurement  
Keyword(2) inverse-scattering analysis  
Keyword(3) computer-generated hologram  
Keyword(4) linear discriminant analysis  
Keyword(5) boundary element method  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Shingo Shimada  
1st Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
2nd Author's Name Jun-ichiro Sugisaka  
2nd Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
3rd Author's Name Koichi Hirayama  
3rd Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
4th Author's Name Takashi Yasui  
4th Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
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Speaker Author-1 
Date Time 2023-05-19 15:30:00 
Presentation Time 25 minutes 
Registration for EMT 
Paper # EMT2023-6 
Volume (vol) vol.123 
Number (no) no.40 
Page pp.27-32 
#Pages 6 
Date of Issue 2023-05-12 (EMT) 

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