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Paper Abstract and Keywords
Presentation 2023-05-19 13:00
[Invited Talk] Repeated bending endurance test of zinc oxide thin films deposited at room temperature on flexible substrates
Toshihiko Maemoto, Kazuyori Oura, Hideo Wada, Masatoshi Koyama, Shigehiko Sasa, Ahikiko Fujii (Osaka Inst. of Tech.) ED2023-1 CPM2023-1 SDM2023-18
Abstract (in Japanese) (See Japanese page) 
(in English) We investigated the device structure of oxide thin-film devices that can operate even when bending, the evaluation of their bending durability, and the fracture mechanism under bending to develop flexible applications of oxide semiconductors. ZnO thin-films were deposited on Cyclo-Olefin-Polymer (COP) substrates using the Pulsed Laser Deposition (PLD) method, and the thin-films were tested using a cyclic bending tester. After the cyclic bending tests, surface observations, crystallinity evaluations, and electrical property measurements were conducted, and the dependence on substrate thickness was evaluated. Using nanoindentation, we discussed the failure mechanism of the samples in the bending tests and determined the optimal sample structure for flexible devices.
Keyword (in Japanese) (See Japanese page) 
(in English) Oxide Semiconductor / Zinc Oxide / Flexible / COP / Nanoindentation / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 41, ED2023-1, pp. 1-6, May 2023.
Paper # ED2023-1 
Date of Issue 2023-05-12 (ED, CPM, SDM) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2023-1 CPM2023-1 SDM2023-18

Conference Information
Committee CPM ED SDM  
Conference Date 2023-05-19 - 2023-05-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2023-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Repeated bending endurance test of zinc oxide thin films deposited at room temperature on flexible substrates 
Sub Title (in English)  
Keyword(1) Oxide Semiconductor  
Keyword(2) Zinc Oxide  
Keyword(3) Flexible  
Keyword(4) COP  
Keyword(5) Nanoindentation  
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Keyword(7)  
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1st Author's Name Toshihiko Maemoto  
1st Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
2nd Author's Name Kazuyori Oura  
2nd Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
3rd Author's Name Hideo Wada  
3rd Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
4th Author's Name Masatoshi Koyama  
4th Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
5th Author's Name Shigehiko Sasa  
5th Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
6th Author's Name Ahikiko Fujii  
6th Author's Affiliation Osaka Institute of Technology (Osaka Inst. of Tech.)
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Speaker Author-1 
Date Time 2023-05-19 13:00:00 
Presentation Time 45 minutes 
Registration for ED 
Paper # ED2023-1, CPM2023-1, SDM2023-18 
Volume (vol) vol.123 
Number (no) no.41(ED), no.42(CPM), no.43(SDM) 
Page pp.1-6 
#Pages 6 
Date of Issue 2023-05-12 (ED, CPM, SDM) 

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