Information: Join today and make your research activities more affordable! Technical workshop participation fees and annual registration fees are available at member rates.
Notice: [Important] Announcement of Changes to Registration Fee Payment and Manuscript Upload Procedures for IEICE Technical Meetings
IEICE Technical Committee Submission System
Conference Paper's Information		 Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2023-05-19 14:35
Micro Periodic Structures (LIPSS) Formed on Si Substrates Using Near-Infrared Free Electron Laser Irradiation
Youta Hoshino, Nohira Masayoshi, Nobuyuki Iwata (Nihon Univ.) ED2023-3 CPM2023-3 SDM2023-20
Abstract (in Japanese) (See Japanese page) 
(in English) We attempted to create Laser-Induced Periodic Surface Structures (LIPSS) by irradiating the Free Electron Laser (FEL) to the low-resistance N-type Si substrate with in the near-infrared region. Using the second harmonic laser generated from a non-linear crystal with a wavelength range of 900 nm to 1200 nm, we successfully created LIPSS with intervals shorter than the wavelength on the irradiation area. We found that the periodic distance of the one dimensional featured structures became wider in proportion to the wavelength: with intervals of 670, 900, and 970 nm at a wavelength of 900, 1100 nm and 1200 nm, respectively. Additionally, we succeeded in creating LIPSS with intervals of approximately 750 nm using a wavelength of 3500 nm FEL.
Keyword (in Japanese) (See Japanese page) 
(in English) LIPSS / Free Electron Laser / FEL / Microscale periodic structures / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 42, CPM2023-3, pp. 11-15, May 2023.
Paper # CPM2023-3 
Date of Issue 2023-05-12 (ED, CPM, SDM) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2023-3 CPM2023-3 SDM2023-20

Conference Information
Committee CPM ED SDM  
Conference Date 2023-05-19 - 2023-05-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2023-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Micro Periodic Structures (LIPSS) Formed on Si Substrates Using Near-Infrared Free Electron Laser Irradiation 
Sub Title (in English)  
Keyword(1) LIPSS  
Keyword(2) Free Electron Laser  
Keyword(3) FEL  
Keyword(4) Microscale periodic structures  
Keyword(5)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Youta Hoshino  
1st Author's Affiliation Nihon University (Nihon Univ.)
2nd Author's Name Nohira Masayoshi  
2nd Author's Affiliation Nihon University (Nihon Univ.)
3rd Author's Name Nobuyuki Iwata  
3rd Author's Affiliation Nihon University (Nihon Univ.)
4th Author's Name  
4th Author's Affiliation ()
5th Author's Name  
5th Author's Affiliation ()
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
21st Author's Name  
21st Author's Affiliation ()
22nd Author's Name  
22nd Author's Affiliation ()
23rd Author's Name  
23rd Author's Affiliation ()
24th Author's Name  
24th Author's Affiliation ()
25th Author's Name  
25th Author's Affiliation ()
26th Author's Name / /
26th Author's Affiliation ()
()
27th Author's Name / /
27th Author's Affiliation ()
()
28th Author's Name / /
28th Author's Affiliation ()
()
29th Author's Name / /
29th Author's Affiliation ()
()
30th Author's Name / /
30th Author's Affiliation ()
()
31st Author's Name / /
31st Author's Affiliation ()
()
32nd Author's Name / /
32nd Author's Affiliation ()
()
33rd Author's Name / /
33rd Author's Affiliation ()
()
34th Author's Name / /
34th Author's Affiliation ()
()
35th Author's Name / /
35th Author's Affiliation ()
()
36th Author's Name / /
36th Author's Affiliation ()
()
Speaker Author-1 
Date Time 2023-05-19 14:35:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # ED2023-3, CPM2023-3, SDM2023-20 
Volume (vol) vol.123 
Number (no) no.41(ED), no.42(CPM), no.43(SDM) 
Page pp.11-15 
#Pages 5 
Date of Issue 2023-05-12 (ED, CPM, SDM) 

[Return to Top Page]

[Return to IEICE Web Page]
The Institute of Electronics, Information and Communication Engineers (IEICE), Japan