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Paper Abstract and Keywords
Presentation 2023-07-20 15:15
Elastic constant tensors cijE of (0001) ScxAl1-xN thin films (x=0-0.63) measured by Brillouin light scattering method
Hiroki Uchida (Waseda Univ.), Hayato Ichihashi (Doshisya Univ.), Masashi Suzuki (Yamanashi Univ.), Shinji Takayanagi, Mami Matsukawa (Doshisya Univ.), Takahiko Yanagitani (Waseda Univ.) EMT2023-20 MW2023-38 OPE2023-20 EST2023-20 MWPTHz2023-16
Abstract (in Japanese) (See Japanese page) 
(in English) Large piezoelectricity and high Q factor in ScAlN film is attractive for RF filter applications. . Elastic constant tensors of ScAlN thin films are important parameters to design the SAW and BAW filters. In this study, elastic constant tensors (except c13E) of ScxAl1-xN films in the wide concentration range of x=0–0.63 were measured from ultrasonic velocities. In-plane bulk longitudinal wave and shear wave velocities (V11E and V66E ) in the c-axis oriented (0001) ScAlN were measured by Brillouin light scattering method with RI[Theta]A geometry. In addition, the out-of plane BAW velocities (V33D and V44E ) and kt2 in the (0001) ScAlN films were determined from the minimum point of the longitudinal wave and shear wave conversion loss curves in the HBAR, respectively.
Keyword (in Japanese) (See Japanese page) 
(in English) ScAlN films / Elastic constant / Piezoelectric thin films / Brillouin scattering / Film bulk acoustic resonators / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 116, OPE2023-20, pp. 61-66, July 2023.
Paper # OPE2023-20 
Date of Issue 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMT2023-20 MW2023-38 OPE2023-20 EST2023-20 MWPTHz2023-16

Conference Information
Committee EST MW EMT OPE MWPTHz IEE-EMT  
Conference Date 2023-07-20 - 2023-07-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Muroran Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Workshop on Optical and Microwave technologies 
Paper Information
Registration To OPE 
Conference Code 2023-07-EST-MW-EMT-OPE-MWPTHz-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Elastic constant tensors cijE of (0001) ScxAl1-xN thin films (x=0-0.63) measured by Brillouin light scattering method 
Sub Title (in English)  
Keyword(1) ScAlN films  
Keyword(2) Elastic constant  
Keyword(3) Piezoelectric thin films  
Keyword(4) Brillouin scattering  
Keyword(5) Film bulk acoustic resonators  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Uchida  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Hayato Ichihashi  
2nd Author's Affiliation Doshisya University (Doshisya Univ.)
3rd Author's Name Masashi Suzuki  
3rd Author's Affiliation Yamanashi University (Yamanashi Univ.)
4th Author's Name Shinji Takayanagi  
4th Author's Affiliation Doshisya University (Doshisya Univ.)
5th Author's Name Mami Matsukawa  
5th Author's Affiliation Doshisya University (Doshisya Univ.)
6th Author's Name Takahiko Yanagitani  
6th Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2023-07-20 15:15:00 
Presentation Time 25 minutes 
Registration for OPE 
Paper # EMT2023-20, MW2023-38, OPE2023-20, EST2023-20, MWPTHz2023-16 
Volume (vol) vol.123 
Number (no) no.114(EMT), no.115(MW), no.116(OPE), no.117(EST), no.118(MWPTHz) 
Page pp.61-66 
#Pages 6 
Date of Issue 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) 

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