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Paper Abstract and Keywords
Presentation 2023-11-27 16:35
SMR based on epitaxial ScAlN piezoelectric thin films/epitaxial acoustic Bragg reflector
Satoshi Tokai, Takahiko Yanagitani (Waseda Univ.) US2023-55
Abstract (in Japanese) (See Japanese page) 
(in English) Single crystalline piezoelectric thin films possess higher power durability and Q factor than polycrystalline ones. However, since acoustic Bragg reflectors are generally composed of polycrystalline or amorphous materials in SMR, it is difficult to fabricate single crystalline piezoelectric layers on acoustic Bragg reflector. In this study, the acoustic Bragg reflector itself was epitaxially grown from the substrate using epitaxial growth technique, which is one of the typical fabrication methods for single crystalline thin films. Furthermore, the bottom electrode and piezoelectric layer were epitaxially grown on epitaxial acoustic Bragg reflector. The crystal orientation of the epitaxial thin film was evaluated by X-ray diffraction and the impedance characteristic of epitaxial SMR were measured by a network analyzer.
Keyword (in Japanese) (See Japanese page) 
(in English) BAW filter / SMR / Epitaxial growth / ScAlN piezoelectric thin films / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 286, US2023-55, pp. 67-72, Nov. 2023.
Paper # US2023-55 
Date of Issue 2023-11-20 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2023-55

Conference Information
Committee US  
Conference Date 2023-11-27 - 2023-11-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Shizuoka University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2023-11-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) SMR based on epitaxial ScAlN piezoelectric thin films/epitaxial acoustic Bragg reflector 
Sub Title (in English)  
Keyword(1) BAW filter  
Keyword(2) SMR  
Keyword(3) Epitaxial growth  
Keyword(4) ScAlN piezoelectric thin films  
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1st Author's Name Satoshi Tokai  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2023-11-27 16:35:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2023-55 
Volume (vol) vol.123 
Number (no) no.286 
Page pp.67-72 
#Pages 6 
Date of Issue 2023-11-20 (US) 

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