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Paper Abstract and Keywords
Presentation 2023-12-22 13:00
[Poster Presentation] Fabrication of epitaxial piezoelectric layer/acoustic Bragg reflector structure by etching of epitaxial sacrificial layer
Satoshi Tokai, Takahiko Yanagitani (Waseda Univ.) US2023-60
Abstract (in Japanese) (See Japanese page) 
(in English) Q factor and power durability are expected to be improve d by using s ingle crystalline piezoelectric thin films in BAW resonators. SM R type of BAW resonator consists of a piezoelectric thin film resonator on acoustic Bragg reflector based on high and low acoustic impedance layers. In general, epitaxial growth technique is difficult to be used to obtain a single crystalline piezoelectric thin film on acoustic Bragg ref l ector because amorphous SiO2 is employed for a low acoustic impedance layer. In this study, we report a method to fabricate the structure with epitaxial ZnO piezoelectric layer on polycrystalline SiO2 Mo acoustic Bragg reflector using wet etching of epitaxial Au sacrificial layer. The crystal orientation of epitaxial thin film s and impedance characteristic of SMR were evaluated
Keyword (in Japanese) (See Japanese page) 
(in English) BAW filter / SMR / Epitaxial growth / Sputtering / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 321, US2023-60, pp. 24-29, Dec. 2023.
Paper # US2023-60 
Date of Issue 2023-12-15 (US) 
ISSN Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2023-60

Conference Information
Committee EA US  
Conference Date 2023-12-22 - 2023-12-23 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2023-12-EA-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of epitaxial piezoelectric layer/acoustic Bragg reflector structure by etching of epitaxial sacrificial layer 
Sub Title (in English)  
Keyword(1) BAW filter  
Keyword(2) SMR  
Keyword(3) Epitaxial growth  
Keyword(4) Sputtering  
1st Author's Name Satoshi Tokai  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2023-12-22 13:00:00 
Presentation Time 120 minutes 
Registration for US 
Paper # US2023-60 
Volume (vol) vol.123 
Number (no) no.321 
Page pp.24-29 
Date of Issue 2023-12-15 (US) 

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