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| Presentation | 2023-12-22 13:00 [Poster Presentation] Fabrication of epitaxial piezoelectric layer/acoustic Bragg reflector structure by etching of epitaxial sacrificial layer Satoshi Tokai, Takahiko Yanagitani (Waseda Univ.)  US2023-60 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Q factor and power durability are expected to be improve d by using s ingle crystalline piezoelectric thin films in BAW resonators. SM R type of BAW resonator consists of a piezoelectric thin film resonator on acoustic Bragg reflector based on high and low acoustic impedance layers. In general, epitaxial growth technique is difficult to be used to obtain a single crystalline piezoelectric thin film on acoustic Bragg ref l ector because amorphous SiO2 is employed for a low acoustic impedance layer. In this study, we report a method to fabricate the structure with epitaxial ZnO piezoelectric layer on polycrystalline SiO2 Mo acoustic Bragg reflector using wet etching of epitaxial Au sacrificial layer. The crystal orientation of epitaxial thin film s and impedance characteristic of SMR were evaluated | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | BAW filter / SMR / Epitaxial growth / Sputtering / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 123, no. 321, US2023-60, pp. 24-29, Dec. 2023. | |
| Paper # | US2023-60 | |
| Date of Issue | 2023-12-15 (US) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2023-60 |
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| Conference Information | |
| Committee | EA US |
| Conference Date | 2023-12-22 - 2023-12-23 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. |
| Paper Information | |
| Registration To | US |
| Conference Code | 2023-12-EA-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of epitaxial piezoelectric layer/acoustic Bragg reflector structure by etching of epitaxial sacrificial layer |
| Sub Title (in English) | |
| Keyword(1) | BAW filter |
| Keyword(2) | SMR |
| Keyword(3) | Epitaxial growth |
| Keyword(4) | Sputtering |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Satoshi Tokai |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2023-12-22 13:00:00 |
| Presentation Time | 120 minutes |
| Registration for | US |
| Paper # | US2023-60 |
| Volume (vol) | vol.123 |
| Number (no) | no.321 |
| Page | pp.24-29 |
| #Pages | 6 |
| Date of Issue | 2023-12-15 (US) |
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