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Paper Abstract and Keywords
Presentation 2023-12-22 13:00
[Poster Presentation] c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer
Shiori Kobayashi, Takahiko Yanagitani (Waseda Univ.) US2023-59
Abstract (in Japanese) (See Japanese page) 
(in English) Piezoelectric thin films with high shear mode electromechanical coupling coefficient k´352 are attractive to improve S/N ratio of shear mode FBAR type sensor and SH-SAW sensors. c-Axis tilted ScAlN thin films possesses high k´352. c-Axis tilted polycrystalline ScAlN films growth can be achieved using oblique sputtering technique. However, it is difficult to obtain uniform film thickness and c-axis tilt angle in a large wafer. Epitaxial growth technique is one of the promising method to obtain c-axis tilted growth in the large area. In this study, we fabricated c-axis tilted epitaxial ScAlN films on c-plane sapphire substrate with 10º and 20º off-angle to the a-plane direction using a standard planar sputtering technique.
Keyword (in Japanese) (See Japanese page) 
(in English) Shear wave ultrasonic transducers / Epitaxial growth / ScAlN piezoelectric thin films / / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 321, US2023-59, pp. 18-23, Dec. 2023.
Paper # US2023-59 
Date of Issue 2023-12-15 (US) 
ISSN Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee EA US  
Conference Date 2023-12-22 - 2023-12-23 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2023-12-EA-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer 
Sub Title (in English)  
Keyword(1) Shear wave ultrasonic transducers  
Keyword(2) Epitaxial growth  
Keyword(3) ScAlN piezoelectric thin films  
1st Author's Name Shiori Kobayashi  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
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Date Time 2023-12-22 13:00:00 
Presentation Time 120 minutes 
Registration for US 
Paper # US2023-59 
Volume (vol) vol.123 
Number (no) no.321 
Page pp.18-23 
Date of Issue 2023-12-15 (US) 

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