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| Presentation | 2023-12-22 13:00 [Poster Presentation] c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer Shiori Kobayashi, Takahiko Yanagitani (Waseda Univ.)  US2023-59 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Piezoelectric thin films with high shear mode electromechanical coupling coefficient k´352 are attractive to improve S/N ratio of shear mode FBAR type sensor and SH-SAW sensors. c-Axis tilted ScAlN thin films possesses high k´352. c-Axis tilted polycrystalline ScAlN films growth can be achieved using oblique sputtering technique. However, it is difficult to obtain uniform film thickness and c-axis tilt angle in a large wafer. Epitaxial growth technique is one of the promising method to obtain c-axis tilted growth in the large area. In this study, we fabricated c-axis tilted epitaxial ScAlN films on c-plane sapphire substrate with 10º and 20º off-angle to the a-plane direction using a standard planar sputtering technique. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Shear wave ultrasonic transducers / Epitaxial growth / ScAlN piezoelectric thin films / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 123, no. 321, US2023-59, pp. 18-23, Dec. 2023. | |
| Paper # | US2023-59 | |
| Date of Issue | 2023-12-15 (US) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2023-59 |
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| Conference Information | |
| Committee | EA US |
| Conference Date | 2023-12-22 - 2023-12-23 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. |
| Paper Information | |
| Registration To | US |
| Conference Code | 2023-12-EA-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer |
| Sub Title (in English) | |
| Keyword(1) | Shear wave ultrasonic transducers |
| Keyword(2) | Epitaxial growth |
| Keyword(3) | ScAlN piezoelectric thin films |
| Keyword(4) | |
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| 1st Author's Name | Shiori Kobayashi |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2023-12-22 13:00:00 |
| Presentation Time | 120 minutes |
| Registration for | US |
| Paper # | US2023-59 |
| Volume (vol) | vol.123 |
| Number (no) | no.321 |
| Page | pp.18-23 |
| #Pages | 6 |
| Date of Issue | 2023-12-15 (US) |
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