Paper Abstract and Keywords |
Presentation |
2023-12-22 15:20
[Poster Presentation]
Large area growth of c-axis tilted Sc0.4Al0.6N thin films using planar sputtering with rectangular cathode Naoki Ishii, Yhoho Shimano, Takahiko Yanagitani (Waseda Univ.) US2023-65 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
c-axis normal ScAlN thin films with Sc concentration exceeding 40% possess high thickness extensional mode electromechanical coupling coefficient kt2. Therefore, the Sc0.4Al0.6N films are promising for BAW filter and pMUT applications. On the other hand, c-axis tilted ScAlN thin film also exhibits a high quasi thickness shear mode k'352. This feature is attractive for improving the signal-to-noise ratio of thin film resonator type sensors operating in liquids. Large area uniformity in film thickness and c-axis tilt angle within the wafer are required for both c-axis normal and tilted films. In this study, c-axis normal Sc0.4Al0.6N and c-axis tilted Sc0.4Al0.6N thin films were grown by a planar RF magnetron sputtering using a rectangular or circular cathode. c-Axis tilt angle and orientation of in the wafer were measured by X-ray pole figure. As a result, both c-axis normal and c-axis tilted ScAlN films showed good uniformity in c-axis tilt angle for a rectangular cathode compared with that for a circular cathode. Electromechanical coupling coefficients kt2 and k’352 of c-axis normal and tilted ScAlN films were estimated using conversion loss method. For c-axis normal films, kt2 = 16% and kt2 = 14% were obtained for the rectangular cathode films and the circular cathode films, respectively. For c-axis tilted films, both circular cathode films and rectangle cathode films exhibit k’352 of 18%. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Rectangular cathode / BAW filter / Sc0.4Al0.6N / AOG less film growt / c-axis tilted ScAlN thin films / / / |
Reference Info. |
IEICE Tech. Rep., vol. 123, no. 321, US2023-65, pp. 53-58, Dec. 2023. |
Paper # |
US2023-65 |
Date of Issue |
2023-12-15 (US) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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US2023-65 |
Conference Information |
Committee |
EA US |
Conference Date |
2023-12-22 - 2023-12-23 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
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Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
[Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. |
Paper Information |
Registration To |
US |
Conference Code |
2023-12-EA-US |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Large area growth of c-axis tilted Sc0.4Al0.6N thin films using planar sputtering with rectangular cathode |
Sub Title (in English) |
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Keyword(1) |
Rectangular cathode |
Keyword(2) |
BAW filter |
Keyword(3) |
Sc0.4Al0.6N |
Keyword(4) |
AOG less film growt |
Keyword(5) |
c-axis tilted ScAlN thin films |
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1st Author's Name |
Naoki Ishii |
1st Author's Affiliation |
Waseda University (Waseda Univ.) |
2nd Author's Name |
Yhoho Shimano |
2nd Author's Affiliation |
Waseda University (Waseda Univ.) |
3rd Author's Name |
Takahiko Yanagitani |
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Waseda University (Waseda Univ.) |
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Speaker |
Author-1 |
Date Time |
2023-12-22 15:20:00 |
Presentation Time |
120 minutes |
Registration for |
US |
Paper # |
US2023-65 |
Volume (vol) |
vol.123 |
Number (no) |
no.321 |
Page |
pp.53-58 |
#Pages |
6 |
Date of Issue |
2023-12-15 (US) |
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