Paper Abstract and Keywords |
Presentation |
2024-02-28 16:45
Research on Routing Method for Spacer-Is-Metal Type Self-Aligned Double Patterning Koki Tanaka, Takuto Amari, Kunihiro Fujiyoshi (TUAT) VLD2023-105 HWS2023-65 ICD2023-94 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
SIM type Self-Aligned Double Patterning is one of the process technologies wiring with a pitch half of the exposure-possible pitch. Since wiring patterns obtained by this technology are only cut off circular areas, wiring design is difficult. To work on this problem, Akatsuka et al. clarified some sufficient conditions where given terminals can be wired and showed a wiring method in the case. However, the positional relationships of terminals he named ``Cross Crossing” and ``Triple Overlap” were excluded because of the difficulty of wiring. In this paper, only in some cases including either ``Cross Crossing” or ``Triple Overlap”, we clarify some sufficient conditions where given terminals can be wired and show a wiring method in the case. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Spacer-Is-Metal type Self-Aligned Double Patterning / SIM type SADP / Routing design / LSI / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 123, no. 390, VLD2023-105, pp. 36-41, Feb. 2024. |
Paper # |
VLD2023-105 |
Date of Issue |
2024-02-21 (VLD, HWS, ICD) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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VLD2023-105 HWS2023-65 ICD2023-94 |
Conference Information |
Committee |
VLD HWS ICD |
Conference Date |
2024-02-28 - 2024-03-02 |
Place (in Japanese) |
(See Japanese page) |
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Topics (in Japanese) |
(See Japanese page) |
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Paper Information |
Registration To |
VLD |
Conference Code |
2024-02-VLD-HWS-ICD |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Research on Routing Method for Spacer-Is-Metal Type Self-Aligned Double Patterning |
Sub Title (in English) |
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Keyword(1) |
Spacer-Is-Metal type Self-Aligned Double Patterning |
Keyword(2) |
SIM type SADP |
Keyword(3) |
Routing design |
Keyword(4) |
LSI |
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1st Author's Name |
Koki Tanaka |
1st Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
2nd Author's Name |
Takuto Amari |
2nd Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
3rd Author's Name |
Kunihiro Fujiyoshi |
3rd Author's Affiliation |
Tokyo University of Agriculture and Technology (TUAT) |
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Speaker |
Author-1 |
Date Time |
2024-02-28 16:45:00 |
Presentation Time |
25 minutes |
Registration for |
VLD |
Paper # |
VLD2023-105, HWS2023-65, ICD2023-94 |
Volume (vol) |
vol.123 |
Number (no) |
no.390(VLD), no.391(HWS), no.392(ICD) |
Page |
pp.36-41 |
#Pages |
6 |
Date of Issue |
2024-02-21 (VLD, HWS, ICD) |
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