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Paper Abstract and Keywords
Presentation 2024-06-06 15:00
High rate RF sputtering of MgO underlayer by hot cathode method with porous target for heat assisted magnetic recording media
Kota Yamada, Daiki Miyazaki, Yuki Hirokawa, Seong-Jae Jeon, Akihiro Shimizu, Shintaro Hinata, Tomoyuki Ogawa, Shin Saito (Tohoku Univ.), Kosaku Iwatani (TOSHIMA Manufacturing Co., Ltd.)
Abstract (in Japanese) (See Japanese page) 
(in English) (Available after conference date)
Keyword (in Japanese) (See Japanese page) 
(in English) RF sputtering / hot cathode / MgO thin film / high rate deposition / pore forming material / porous structure target / high thermal stress tolerant /  
Reference Info. IEICE Tech. Rep.
Paper #  
Date of Issue  
ISSN Online edition: ISSN 2432-6380
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Conference Information
Committee MRIS ITE-MMS  
Conference Date 2024-06-06 - 2024-06-07 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku Univ., RIEC 
Topics (in Japanese) (See Japanese page) 
Topics (in English) recording system/head/media, etc. 
Paper Information
Registration To MRIS 
Conference Code 2024-06-MRIS-MMS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High rate RF sputtering of MgO underlayer by hot cathode method with porous target for heat assisted magnetic recording media 
Sub Title (in English)  
Keyword(1) RF sputtering  
Keyword(2) hot cathode  
Keyword(3) MgO thin film  
Keyword(4) high rate deposition  
Keyword(5) pore forming material  
Keyword(6) porous structure target  
Keyword(7) high thermal stress tolerant  
Keyword(8)  
1st Author's Name Kota Yamada  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Daiki Miyazaki  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Yuki Hirokawa  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Seong-Jae Jeon  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Akihiro Shimizu  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Shintaro Hinata  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Tomoyuki Ogawa  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
8th Author's Name Shin Saito  
8th Author's Affiliation Tohoku University (Tohoku Univ.)
9th Author's Name Kosaku Iwatani  
9th Author's Affiliation TOSHIMA Manufacturing Co., Ltd. (TOSHIMA Manufacturing Co., Ltd.)
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Speaker Author-1 
Date Time 2024-06-06 15:00:00 
Presentation Time 25 minutes 
Registration for MRIS 
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