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Paper Abstract and Keywords
Presentation 2024-06-25 15:45
[Poster Presentation] High-speed polyimide capacitive-type humidity sensors with thin CYTOP layer between sensing layer and bottom electrodes
Yasuhiro Aruga, Jotaro Iguchi, Eiji Itoh (Shinshu Univ.) OME2024-11
Abstract (in Japanese) (See Japanese page) 
(in English) Thinner polyimide capacitive-type humidity sensors have a problem that the response deteriorates due to the influence of water molecules adsorbed at the interface between the bottom electrode and the sensing layer. In this study, a vertical polyimide capacitive-type humidity sensor with a thin CYTOP layer between the ITO bottom electrode and the sensing layer was fabricated to achieve a fast response by reducing the influence of water molecules. Devices with different water repellency of the bottom electrode surface and the sensing layer were fabricated and compared in terms of sensitivity and response. The addition of the CYTOP layer resulted in a 1.5 times faster response in a device with a sensing layer thickness of about 300 nm.
Keyword (in Japanese) (See Japanese page) 
(in English) capacitive-type humidity sensor / multi-walled carbon nanotube / fluorinated polyimide / CYTOP / interface / / /  
Reference Info. IEICE Tech. Rep., vol. 124, no. 89, OME2024-11, pp. 13-16, June 2024.
Paper # OME2024-11 
Date of Issue 2024-06-18 (OME) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF OME2024-11

Conference Information
Committee OME IEE-DEI  
Conference Date 2024-06-25 - 2024-06-25 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OME 
Conference Code 2024-06-OME-DEI 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High-speed polyimide capacitive-type humidity sensors with thin CYTOP layer between sensing layer and bottom electrodes 
Sub Title (in English)  
Keyword(1) capacitive-type humidity sensor  
Keyword(2) multi-walled carbon nanotube  
Keyword(3) fluorinated polyimide  
Keyword(4) CYTOP  
Keyword(5) interface  
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Keyword(7)  
Keyword(8)  
1st Author's Name Yasuhiro Aruga  
1st Author's Affiliation Shinshu University (Shinshu Univ.)
2nd Author's Name Jotaro Iguchi  
2nd Author's Affiliation Shinshu University (Shinshu Univ.)
3rd Author's Name Eiji Itoh  
3rd Author's Affiliation Shinshu University (Shinshu Univ.)
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Speaker Author-1 
Date Time 2024-06-25 15:45:00 
Presentation Time 75 minutes 
Registration for OME 
Paper # OME2024-11 
Volume (vol) vol.124 
Number (no) no.89 
Page pp.13-16 
#Pages 4 
Date of Issue 2024-06-18 (OME) 

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