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Paper Abstract and Keywords
Presentation 2024-08-30 13:40
Effect of mechanical stress on long-term dielectric breakdown (TDDB) of lead zirconate titanate (PZT)
Yasushi Kadota, Shinichi Harada (RICOH) R2024-25 EMD2024-19 CPM2024-35 OPE2024-75 LQE2024-22
Abstract (in Japanese) (See Japanese page) 
(in English) Lead zirconate titanate (PZT) is one of the highest performance ferroelectric materials and has been applied to many systems as Micro Electro-Mechanical Systems (MEMS) devices due to its piezoelectric performance. Various research organizations have reported that the intrinsic failure of MEMS devices is long-term dielectric breakdown (TDDB) caused by temperature and voltage. However, the Ion (Hole)-Drift model was proposed as a detailed failure mechanism for TDDB, but the authors obtained experimental results that it is not applicable to some PZTs, and considered the Mechanical and Electrical Combine model, which combines mechanical and electrical stresses. Combine model, which combines mechanical and electrical stresses, have been developed. This model is based on a mechanism in which cracks and voids are generated not by stresses generated by external forces, but by stresses generated by piezoelectric characteristics, and partial discharge current repeatedly flows in these areas, leading to dielectric breakdown due to the combined progress of reactions caused by discharge damage and mechanical damage. Even in this known failure mechanism, we believe that other factors may have an influence.
Keyword (in Japanese) (See Japanese page) 
(in English) Piezoelectric film / lead zirconate titanate (PZT) / long-term dielectric breakdown model / mechanical stress / / / /  
Reference Info. IEICE Tech. Rep., vol. 124, no. 167, R2024-25, pp. 61-66, Aug. 2024.
Paper # R2024-25 
Date of Issue 2024-08-22 (R, EMD, CPM, OPE, LQE) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF R2024-25 EMD2024-19 CPM2024-35 OPE2024-75 LQE2024-22

Conference Information
Committee CPM LQE OPE EMD R  
Conference Date 2024-08-29 - 2024-08-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Hirosaki University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Photodetectors, Modulators, Optical Electrical device packaging and reliability 
Paper Information
Registration To R 
Conference Code 2024-08-CPM-LQE-OPE-EMD-R 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effect of mechanical stress on long-term dielectric breakdown (TDDB) of lead zirconate titanate (PZT) 
Sub Title (in English)  
Keyword(1) Piezoelectric film  
Keyword(2) lead zirconate titanate (PZT)  
Keyword(3) long-term dielectric breakdown model  
Keyword(4) mechanical stress  
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1st Author's Name Yasushi Kadota  
1st Author's Affiliation Advanced technology R&D Division, Ricoh Company, Ltd. (RICOH)
2nd Author's Name Shinichi Harada  
2nd Author's Affiliation Advanced technology R&D Division, Ricoh Company, Ltd. (RICOH)
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Speaker Author-1 
Date Time 2024-08-30 13:40:00 
Presentation Time 25 minutes 
Registration for R 
Paper # R2024-25, EMD2024-19, CPM2024-35, OPE2024-75, LQE2024-22 
Volume (vol) vol.124 
Number (no) no.167(R), no.168(EMD), no.169(CPM), no.170(OPE), no.171(LQE) 
Page pp.61-66 
#Pages 6 
Date of Issue 2024-08-22 (R, EMD, CPM, OPE, LQE) 

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