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Paper Abstract and Keywords
Presentation 2024-11-07 15:55
c-Axis tilted LiNbO3 off-angle epitaxial thin film SMR
Hiroki Uchida, Takahiko Yanagitani (Waseda Univ.) US2024-58
Abstract (in Japanese) (See Japanese page) 
(in English) The c-axis tilted LiNbO3 thin film bulk acoustic wave (BAW) filter is anticipated to exhibit a high electromechanical coupling coefficient (k2). However, resonators operating above 10 GHz may face challenges related to the bonding and thinning of the LiNbO3 layer. Epitaxial growth techniques are expected to enable the fabrication of ultra-thin films with high crystallinity and allow for large-area production exceeding 8 inches. In this study, three types of epitaxial LiNbO3 SMR on Al2O3 substrates with 0°, 10°, and 20° off-angle and six pairs of epitaxial Ti/Pt as a Bragg reflector, using RF magnetron sputtering are fabricated. The successful epitaxial growth was confirmed through six-fold symmetry in X-ray diffraction (XRD) pole figures. Resonance and antiresonance peaks were observed around 1.8 GHz, with effective coupling coefficients (keff²) estimated at 2.2%, 6.6%, and 4.6% for the 0°, 10°, and 20° tilted SMRs, respectively.
Keyword (in Japanese) (See Japanese page) 
(in English) BAW / SMR / LiNbO3 thin film / Epitaxial growth / Sputtering / Off-angle substrate / /  
Reference Info. IEICE Tech. Rep., vol. 124, no. 235, US2024-58, pp. 35-40, Nov. 2024.
Paper # US2024-58 
Date of Issue 2024-10-31 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2024-58

Conference Information
Committee US  
Conference Date 2024-11-07 - 2024-11-07 
Place (in Japanese) (See Japanese page) 
Place (in English) AICHI INSTITUTE OF TECHNOLOGY Univ 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2024-11-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) c-Axis tilted LiNbO3 off-angle epitaxial thin film SMR 
Sub Title (in English)  
Keyword(1) BAW  
Keyword(2) SMR  
Keyword(3) LiNbO3 thin film  
Keyword(4) Epitaxial growth  
Keyword(5) Sputtering  
Keyword(6) Off-angle substrate  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Uchida  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2024-11-07 15:55:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2024-58 
Volume (vol) vol.124 
Number (no) no.235 
Page pp.35-40 
#Pages 6 
Date of Issue 2024-10-31 (US) 

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