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Paper Abstract and Keywords
Presentation 2025-12-12 09:50
Evaluation of electron beam angle for shape of W nano-protrusion emitters
Junki Shima, Shuto Horikawa, Tatsuo Iwata, Shigekazu Nagai (Mie Univ.) ED2025-48
Abstract (in Japanese) (See Japanese page) 
(in English) The development of high brightness electron sources is required to further improve the spatial resolution ofmicroanalysis instruments, including electron microscopes. In this study, we evaluated the dependence of the electron beamdivergence through simulations and experiments for geometry of field emitters with nano-protrusion, which are expected toachieve both a smaller source size and narrower beam divergence. Electron trajectory calculations revealed a tendency for theelectron beam divergence to narrow as the base radius of curvature and shank angle increase and the protrusion height decrease.This tendency corresponds to experimental observations of W nano-protrusion emitter fabricated by field-assisted oxygenetching, suggesting to decrease as the protrusion height decreases.
Keyword (in Japanese) (See Japanese page) 
(in English) Field-assisted oxygen etching / Electron source / Field electron microscope / / / / /  
Reference Info. IEICE Tech. Rep., vol. 125, no. 287, ED2025-48, pp. 24-26, Dec. 2025.
Paper # ED2025-48 
Date of Issue 2025-12-04 (ED) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2025-48

Conference Information
Committee ED  
Conference Date 2025-12-11 - 2025-12-12 
Place (in Japanese) (See Japanese page) 
Place (in English) WINC AICHI 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Applications of electron and ion beam 
Paper Information
Registration To ED 
Conference Code 2025-12-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of electron beam angle for shape of W nano-protrusion emitters 
Sub Title (in English)  
Keyword(1) Field-assisted oxygen etching  
Keyword(2) Electron source  
Keyword(3) Field electron microscope  
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1st Author's Name Junki Shima  
1st Author's Affiliation Mie University (Mie Univ.)
2nd Author's Name Shuto Horikawa  
2nd Author's Affiliation Mie University (Mie Univ.)
3rd Author's Name Tatsuo Iwata  
3rd Author's Affiliation Mie University (Mie Univ.)
4th Author's Name Shigekazu Nagai  
4th Author's Affiliation Mie University (Mie Univ.)
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Speaker Author-1 
Date Time 2025-12-12 09:50:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2025-48 
Volume (vol) vol.125 
Number (no) no.287 
Page pp.24-26 
#Pages 3 
Date of Issue 2025-12-04 (ED) 

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