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Paper Abstract and Keywords
Presentation 2025-12-12 09:00
Evaluation of TiN coated volcano-structured field emitter array before and after thermal treatment
Yusuke Kawasaki, Hidekazu Murata (Meijo Univ.), Hiromasa Murata, Masayoshi Nagao (AIST) ED2025-46
Abstract (in Japanese) (See Japanese page) 
(in English) It is generally difficult to quantitatively evaluate the effect of surface treatments, such as heating and aging, on the emission-current uniformity of FEAs, and such evaluations are typically performed by observing the number of active tips. In this study, by using a multi-emitter evaluation system equipped with a diffraction aperture, a selector aperture, and a Faraday cup, we measured the emission current of each individual tip and calculated its contribution ratio to the total emission current. This enabled a quantitative assessment of the emission-current uniformity. The results revealed that the thermal and aging treatments improved both the uniformity and stability of the emission current in the FEA.
Keyword (in Japanese) (See Japanese page) 
(in English) Volcano-structured field emitter array / TiN / LEEM/PEEM / / / / /  
Reference Info. IEICE Tech. Rep., vol. 125, no. 287, ED2025-46, pp. 18-21, Dec. 2025.
Paper # ED2025-46 
Date of Issue 2025-12-04 (ED) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2025-46

Conference Information
Committee ED  
Conference Date 2025-12-11 - 2025-12-12 
Place (in Japanese) (See Japanese page) 
Place (in English) WINC AICHI 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Applications of electron and ion beam 
Paper Information
Registration To ED 
Conference Code 2025-12-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of TiN coated volcano-structured field emitter array before and after thermal treatment 
Sub Title (in English)  
Keyword(1) Volcano-structured field emitter array  
Keyword(2) TiN  
Keyword(3) LEEM/PEEM  
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1st Author's Name Yusuke Kawasaki  
1st Author's Affiliation Meijo University (Meijo Univ.)
2nd Author's Name Hidekazu Murata  
2nd Author's Affiliation Meijo University (Meijo Univ.)
3rd Author's Name Hiromasa Murata  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Masayoshi Nagao  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2025-12-12 09:00:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2025-46 
Volume (vol) vol.125 
Number (no) no.287 
Page pp.18-21 
#Pages 4 
Date of Issue 2025-12-04 (ED) 

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