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Paper Abstract and Keywords
Presentation 2025-12-12 09:25
Evaluation of TiN film properties and electron emission characteristics in TiN-coated Si emitter arrays
Hiromasa Murata (AIST), Tomoaki Osumi (Kyoto Univ./AIST), Yasuhito Gotoh (Kyoto Univ.), Katsuhisa Murakami, Masayoshi Nagao (AIST) ED2025-47
Abstract (in Japanese) (See Japanese page) 
(in English) We have previously demonstrated a large emission current of approximately 8 mA from ~1000 tips emitter array by depositing a TiN coating on Si emitter via reactive sputtering using a Ti target and an N₂ gas. Although the properties of TiN coating film strongly depend on the sputtering condition, the correlation between the sputtering deposition conditions of TiN and the electron emission characteristics of the emitter array has not yet been clarified. In this study, we investigated the effect of the Ar/N₂ gas flow ratio during sputtering on their electron emission characteristics.
Keyword (in Japanese) (See Japanese page) 
(in English) TiN / Field emitter array / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 125, no. 287, ED2025-47, pp. 22-23, Dec. 2025.
Paper # ED2025-47 
Date of Issue 2025-12-04 (ED) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2025-47

Conference Information
Committee ED  
Conference Date 2025-12-11 - 2025-12-12 
Place (in Japanese) (See Japanese page) 
Place (in English) WINC AICHI 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Applications of electron and ion beam 
Paper Information
Registration To ED 
Conference Code 2025-12-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of TiN film properties and electron emission characteristics in TiN-coated Si emitter arrays 
Sub Title (in English)  
Keyword(1) TiN  
Keyword(2) Field emitter array  
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1st Author's Name Hiromasa Murata  
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
2nd Author's Name Tomoaki Osumi  
2nd Author's Affiliation Kyoto University/National Institute of Advanced Industrial Science and Technology (Kyoto Univ./AIST)
3rd Author's Name Yasuhito Gotoh  
3rd Author's Affiliation Kyoto University (Kyoto Univ.)
4th Author's Name Katsuhisa Murakami  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Masayoshi Nagao  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2025-12-12 09:25:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2025-47 
Volume (vol) vol.125 
Number (no) no.287 
Page pp.22-23 
#Pages 2 
Date of Issue 2025-12-04 (ED) 

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