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Paper Abstract and Keywords
Presentation 2025-12-27 10:00
Effects of pulse oscillation on diamond synthesis using mode conversion type pulse microwave plasma CVD
Yuna Nakamura, Yuta Izu, Yukihiro Sakamoto (CIT) OME2025-46
Abstract (in Japanese) (See Japanese page) 
(in English) Diamond can be synthesized by CVD but it is difficult to grow uniform films on large area and slow growth rate. Using pulse oscillation, can improve the film growth rate and the nucleation density because it enable high power synthesis. However, appropriate pulse oscillation on diamond synthesis has not been determined using mode conversion type pulse microwave plasma CVD.
In this study, we investigated the effect of pulse oscillation on diamond synthesis using mode conversion type pulse microwave plasma CVD. As a result, pulse oscillation make stronger emission intensity than CW, and that lower pulse frequencies tend to result lower electronic temperatures.
Keyword (in Japanese) (See Japanese page) 
(in English) Diamond / Mode conversion type / pulse / microwave plasma / CVD / / /  
Reference Info. IEICE Tech. Rep., vol. 125, no. 309, OME2025-46, pp. 24-28, Dec. 2025.
Paper # OME2025-46 
Date of Issue 2025-12-19 (OME) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF OME2025-46

Conference Information
Committee OME  
Conference Date 2025-12-26 - 2025-12-27 
Place (in Japanese) (See Japanese page) 
Place (in English) OKINAWAKEN SEINENKAIKAN 
Topics (in Japanese) (See Japanese page) 
Topics (in English) biotechnology, surface and interfacial phenomena, measurement technology, electronics, etc. 
Paper Information
Registration To OME 
Conference Code 2025-12-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effects of pulse oscillation on diamond synthesis using mode conversion type pulse microwave plasma CVD 
Sub Title (in English)  
Keyword(1) Diamond  
Keyword(2) Mode conversion type  
Keyword(3) pulse  
Keyword(4) microwave plasma  
Keyword(5) CVD  
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1st Author's Name Yuna Nakamura  
1st Author's Affiliation Chiba Institute of Technology (CIT)
2nd Author's Name Yuta Izu  
2nd Author's Affiliation Chiba Institute of Technology (CIT)
3rd Author's Name Yukihiro Sakamoto  
3rd Author's Affiliation Chiba Institute of Technology (CIT)
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Speaker Author-1 
Date Time 2025-12-27 10:00:00 
Presentation Time 15 minutes 
Registration for OME 
Paper # OME2025-46 
Volume (vol) vol.125 
Number (no) no.309 
Page pp.24-28 
#Pages 5 
Date of Issue 2025-12-19 (OME) 

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