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Paper Abstract and Keywords
Presentation 2026-05-12 15:25
Analysis of thickness-shear mode resonance properties on piezoelectric substrates with periodic voids
Hikaru Nakajima, Shumpei Kobayashi, Masashi Suzuki, Shoji Kakio (Univ. of Yamanashi) US2026-8
Abstract (in Japanese) (See Japanese page) 
(in English) The bonded structure with periodic voids at the interface between a LiNbO3(LN) thin plate and a supporting substrate, proposed by our research group, has been shown to exhibit resonance properties close to plate waves on an LN thin plate. In this study, the bonded structure with periodic voids was applied to a laterally-excited bulk-wave resonator (XBAR) using 120°Y-cut LN, and its resonance properties were analyzed using the finite element method (FEM). For the bonded structure comprising of LN and a supporting substrate with periodic voids, the resonance properties were found to approach those of an XBAR with increasing ratio of the void width w to the electrode pitch p (w/p). In addition, by employing AT90°X-Qz and SiO2 as supporting substrates, responses with reduced spurious modes were obtained. Furthermore, by introducing a SiO2 layer at the interface between LN and 4H-SiC, spurious responses were suppressed compared to the case with a 4H-SiC substrate, while the admittance ratio and the effective electromechanical coupling factor were improved.
Keyword (in Japanese) (See Japanese page) 
(in English) bulk acoustic wave / thickness-shear mode resonator / XBAR / periodec voids / / / /  
Reference Info. IEICE Tech. Rep., vol. 126, no. 14, US2026-8, pp. 37-40, May 2026.
Paper # US2026-8 
Date of Issue 2026-05-05 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2026-8

Conference Information
Committee US  
Conference Date 2026-05-12 - 2026-05-12 
Place (in Japanese) (See Japanese page) 
Place (in English) Surugadai Campus, Nihon University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Nonlinear acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2026-05-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Analysis of thickness-shear mode resonance properties on piezoelectric substrates with periodic voids 
Sub Title (in English)  
Keyword(1) bulk acoustic wave  
Keyword(2) thickness-shear mode resonator  
Keyword(3) XBAR  
Keyword(4) periodec voids  
Keyword(5)  
Keyword(6)  
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1st Author's Name Hikaru Nakajima  
1st Author's Affiliation University of Yamanashi (Univ. of Yamanashi)
2nd Author's Name Shumpei Kobayashi  
2nd Author's Affiliation University of Yamanashi (Univ. of Yamanashi)
3rd Author's Name Masashi Suzuki  
3rd Author's Affiliation University of Yamanashi (Univ. of Yamanashi)
4th Author's Name Shoji Kakio  
4th Author's Affiliation University of Yamanashi (Univ. of Yamanashi)
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Speaker Author-1 
Date Time 2026-05-12 15:25:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2026-8 
Volume (vol) vol.126 
Number (no) no.14 
Page pp.37-40 
#Pages 4 
Date of Issue 2026-05-05 (US) 

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