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Paper Abstract and Keywords
Presentation 2026-08-07 10:55
Superconducting NbN Thin Films Deposited at Room Temperature on Low-Dielectric-Loss Flexible PTFE Substrates and Their Application to Transmission Lines
Daiki Muto, Noto Sekiya, Keita Sakuma (Yamanashi Univ.) SCE2026-5
Abstract (in Japanese) (See Japanese page) 
(in English) Superconducting NbN thin film was deposited at room temperature on low-dielectric-loss flexible PTFE substrate. To suppress plasma damage the film was deposited in an off-axis configuration. As a result, the film with a high critical temperature of 15.6 K was successfully fabricated on a 50-mm-square PTFE substrate. Furthermore, we designed microstrip transmission lines consisting of the film conductor and the substrate.
Keyword (in Japanese) (See Japanese page) 
(in English) Flexible cable / PTFE substrate / NbN thin film / Reactive magnetron sputtering / / / /  
Reference Info. IEICE Tech. Rep., vol. 126, no. 145, SCE2026-5, pp. 25-30, Aug. 2026.
Paper # SCE2026-5 
Date of Issue 2026-07-31 (SCE) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SCE2026-5

Conference Information
Committee SCE  
Conference Date 2026-08-07 - 2026-08-07 
Place (in Japanese) (See Japanese page) 
Place (in English) University of Yamanashi 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Superconducting Electronics, etc. 
Paper Information
Registration To SCE 
Conference Code 2026-08-SCE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Superconducting NbN Thin Films Deposited at Room Temperature on Low-Dielectric-Loss Flexible PTFE Substrates and Their Application to Transmission Lines 
Sub Title (in English)  
Keyword(1) Flexible cable  
Keyword(2) PTFE substrate  
Keyword(3) NbN thin film  
Keyword(4) Reactive magnetron sputtering  
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1st Author's Name Daiki Muto  
1st Author's Affiliation Yamanashi University (Yamanashi Univ.)
2nd Author's Name Noto Sekiya  
2nd Author's Affiliation Yamanashi University (Yamanashi Univ.)
3rd Author's Name Keita Sakuma  
3rd Author's Affiliation Yamanashi University (Yamanashi Univ.)
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Speaker Author-1 
Date Time 2026-08-07 10:55:00 
Presentation Time 25 minutes 
Registration for SCE 
Paper # SCE2026-5 
Volume (vol) vol.126 
Number (no) no.145 
Page pp.25-30 
#Pages 6 
Date of Issue 2026-07-31 (SCE) 

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