| Paper Abstract and Keywords |
| Presentation |
2026-09-10 14:10
Comparative Evaluation of TRL and SOLT Calibrations for On-Wafer Millimeter-Wave Measurements and the Effects of Substrate Materials Junichi Hayasaka (Denjiken), Makoto Yoshida (CDEX) MW2026-71 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The effects of substrate materials, transmission-line structures, and TRL/SOLT calibration methods on millimeter-wave on-wafer measurements are investigated. TRL calibration standards were designed and fabricated on alumina, quartz, and aluminum nitride substrates, and uniform transmission lines, stepped-impedance lines, and low-pass filters were evaluated. Quartz exhibited the lowest insertion loss of −0.004 dB at 44 GHz and the smoothest frequency response, whereas aluminum nitride showed noticeable phase and group-delay fluctuations above 30 GHz. The maximum difference in the 3-dB cutoff frequency between TRL and SOLT calibrations was 0.11 GHz (0.5%). These results clarify the respective effects of substrate materials, transmission-line structures, and calibration methods, providing useful guidelines for the design of TRL calibration standards and the selection of substrate materials and transmission-line structures for millimeter-wave on-wafer measurements. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
TRL Calibration / On-Wafer Measurement / Millimeter-Wave Measurement / Alumina Substrate / Quartz Substrate / Aluminum Nitride Substrate / RF Filter / |
| Reference Info. |
IEICE Tech. Rep., vol. 126, no. 173, MW2026-71, pp. 18-23, Sept. 2026. |
| Paper # |
MW2026-71 |
| Date of Issue |
2026-09-03 (MW) |
| ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
MW2026-71 |
| Conference Information |
| Committee |
MW AP |
| Conference Date |
2026-09-09 - 2026-09-11 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Ishikawa Prefectural Library |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Microwave, Millimeter wave, Radio propagation, Antennas and Propagation |
| Paper Information |
| Registration To |
MW |
| Conference Code |
2026-09-MW-AP |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Comparative Evaluation of TRL and SOLT Calibrations for On-Wafer Millimeter-Wave Measurements and the Effects of Substrate Materials |
| Sub Title (in English) |
|
| Keyword(1) |
TRL Calibration |
| Keyword(2) |
On-Wafer Measurement |
| Keyword(3) |
Millimeter-Wave Measurement |
| Keyword(4) |
Alumina Substrate |
| Keyword(5) |
Quartz Substrate |
| Keyword(6) |
Aluminum Nitride Substrate |
| Keyword(7) |
RF Filter |
| Keyword(8) |
|
| 1st Author's Name |
Junichi Hayasaka |
| 1st Author's Affiliation |
Research Institute for Electromagnetic Materials (Denjiken) |
| 2nd Author's Name |
Makoto Yoshida |
| 2nd Author's Affiliation |
CDEX, Co., Ltd. (CDEX) |
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| Speaker |
Author-1 |
| Date Time |
2026-09-10 14:10:00 |
| Presentation Time |
20 minutes |
| Registration for |
MW |
| Paper # |
MW2026-71 |
| Volume (vol) |
vol.126 |
| Number (no) |
no.173 |
| Page |
pp.18-23 |
| #Pages |
6 |
| Date of Issue |
2026-09-03 (MW) |