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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM (Joint) [detail] |
2011-11-29 13:50 |
Miyazaki |
NewWelCity Miyazaki |
[Invited Talk]
Integrated CMOS-MEMS Technology and Its Applications Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90 |
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated compleme... [more] |
CPM2011-158 ICD2011-90 pp.47-52 |
SDM, ICD |
2011-08-25 12:50 |
Toyama |
Toyama kenminkaikan |
[Invited Talk]
Sub-nanowatt Circuit Techniques Enabling Wireless-sensor-node Operation with an Energy Harvester Mamoru Ugajin, Toshishige Shimamura, Hiroki Morimura, Shin'ichiro Mutoh, Mitsuru Harada (NTT) SDM2011-77 ICD2011-45 |
Sub-nanowatt circuit techniques for wireless sensor-node operation with a nonowatt energy harvester are presented. Issue... [more] |
SDM2011-77 ICD2011-45 pp.35-40 |
EMD |
2008-04-18 14:25 |
Tokyo |
NTT Musashino Research and Development Center |
Electrodeposition of Organic Dielectric Film on MEMS Devices for improvement of Reliability Tomomi Sakata, Kei Kuwabara, Norio Sato, Toshishige Shimamura, Hiromu Ishii (NTT), Kazuhisa Kudou, Katsuyuki Machida (NTT-AT) EMD2008-3 |
This article introduces a technique that prevents sticking between actuator and control electrode in microelectromechani... [more] |
EMD2008-3 pp.13-16 |
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