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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2023-02-07 10:45 |
Tokyo |
Tokyo Univ. (Primary: On-site, Secondary: Online) |
[Invited Talk]
Atomic Layer and Conformal Etching Technologies of 3D Structures in Advanced Logic and Memory Devices Hiroto Ohtake (Hitachi High-Tech Corp.) SDM2022-86 |
Isotropic atomic layer etching (ALE) has become essential technology for the fabrication of logic transistors beyond 2nm... [more] |
SDM2022-86 pp.5-8 |
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