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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ED, MW |
2024-01-25 14:00 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. (Primary: On-site, Secondary: Online) |
Reduction of Wafer Warpage in GaAs Semiconductor Process Koichiro Nishizawa (Mitsubishi Electric), Ayumu Matsumoto, Naoki Fukumuro (University of Hyogo), Yasuyuki Nakagawa, Takayuki Hisaka, Hitoshi Sakuma, Yoshiki Kojima (Mitsubishi Electric), Shinji Yae (University of Hyogo) ED2023-65 MW2023-157 |
The Ni-P plating film used for the back electrode of GaAs semiconductors has high stress, which is a factor in wafer war... [more] |
ED2023-65 MW2023-157 pp.1-3 |
MW, ED |
2023-01-27 13:15 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. (Primary: On-site, Secondary: Online) |
ED2022-92 MW2022-151 |
(To be available after the conference date) [more] |
ED2022-92 MW2022-151 pp.33-35 |
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