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Committee Date Time Place Paper Title / Authors Abstract Paper #
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM
(Joint) [detail]		 2011-11-29
13:50		 Miyazaki NewWelCity Miyazaki [Invited Talk] Integrated CMOS-MEMS Technology and Its Applications
Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90		 The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated compleme... [more] CPM2011-158 ICD2011-90
pp.47-52
SDM, ICD 2011-08-25
12:50		 Toyama Toyama kenminkaikan [Invited Talk] Sub-nanowatt Circuit Techniques Enabling Wireless-sensor-node Operation with an Energy Harvester
Mamoru Ugajin, Toshishige Shimamura, Hiroki Morimura, Shin'ichiro Mutoh, Mitsuru Harada (NTT) SDM2011-77 ICD2011-45		 Sub-nanowatt circuit techniques for wireless sensor-node operation with a nonowatt energy harvester are presented. Issue... [more] SDM2011-77 ICD2011-45
pp.35-40
EMD 2008-04-18
14:25		 Tokyo NTT Musashino Research and Development Center Electrodeposition of Organic Dielectric Film on MEMS Devices for improvement of Reliability
Tomomi Sakata, Kei Kuwabara, Norio Sato, Toshishige Shimamura, Hiromu Ishii (NTT), Kazuhisa Kudou, Katsuyuki Machida (NTT-AT) EMD2008-3		 This article introduces a technique that prevents sticking between actuator and control electrode in microelectromechani... [more] EMD2008-3
pp.13-16
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