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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
EID, SDM, ITE-IDY [detail] |
2018-12-25 13:15 |
Kyoto |
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Effects of SiOx Capping Film on Crystallization of Ge Film for Flash Lamp Annealing (Ⅱ) Yoshiki akita, Naoto Matsuo (Univ. of Hyogo), Kazuyuki Kohama, Kazuhiro Ito (Osaka Univ.) EID2018-5 SDM2018-78 |
We examined the effect of SiOx capping film on Ge films in FLA. The crystallinity was different between SPC and LPC. At ... [more] |
EID2018-5 SDM2018-78 pp.17-20 |
SDM, EID |
2017-12-22 16:00 |
Kyoto |
Kyoto University |
Effect of SiOx capping film on crystallization of Ge film by flash lamp annealing Naoki Yoshioka, Yoshiki Akita, Akira Heya, Naoto Matsuo (Univ of Hyogo), Kazuyuki Kohama, Kazuhiro Itou (Osaka Univ) EID2017-26 SDM2017-87 |
[more] |
EID2017-26 SDM2017-87 pp.77-80 |
SDM, EID |
2017-12-22 16:15 |
Kyoto |
Kyoto University |
Effect of photonic band gap on flash-lamp-annealing crystallization for Islands-shape a-Ge film Naoki Yoshioka, Akira Heya, Naoto Matsuo, Yoshiki Akita (Univ og Hyogo) EID2017-27 SDM2017-88 |
[more] |
EID2017-27 SDM2017-88 pp.81-84 |
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