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Conference Papers (Available on Advance Programs) (Sort by: Date Descending)

Committee	Date Time	Place		Paper Title / Authors	Abstract	Paper #
SDM	2008-10-10 13:00	Miyagi	Tohoku Univ.	The Application Property of B18H22 Implantation for Millisecond Annealing Yoji Kawasaki, Seiichi Endo, Masashi Kitazawa, Yoshiki Maruyama, Tomohiro Yamashita, Takashi Kuroi, Hidefumi Yoshimura, Masahiro Yoneda (Renesas) SDM2008-161	We investigated the application properties of cluster implantation for milli-second annealing processing. We successful... [more]	SDM2008-161 pp.37-40
SDM	2007-10-05 15:25	Miyagi	Tohoku Univ.	Shallow Junction Formation Using Combination of LSA and Spike-RTA Seiichi Endo, Yoshiki Maruyama, Yoji Kawasaki, Tomohiro Yamashita, Hidekazu Oda, Yasuo Inoue (Renesas) SDM2007-191	In this work, Xj-Rs tradeoffs of BF2-SDE are investigated for several combinations of spike-RTA and LSA, and it is demon... [more]	SDM2007-191 pp.61-64

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