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Committee Date Time Place Paper Title / Authors Abstract Paper #
IMQ, IE, MVE, CQ
(Joint) [detail]
2023-03-17
10:45
Okinawa Okinawaken Seinenkaikan (Naha-shi)
(Primary: On-site, Secondary: Online)
Wiped-Rate Estimation for Semiconductor Manufacturing Using DNN Based on 3D Body Tracking
Takehiro Nagata (Univ. of Tsukuba), Li-Wei Cheng (NCKU), Hidehiko Shishido (Univ. of Tsukuba), Hyejin Kim, Chanya Mahapun, Naoki Yoshii, Tsuyoshi Moriya (TEL), Itaru Kitahara (Univ. of Tsukuba) IMQ2022-67 IE2022-144 MVE2022-97
This research presents a method to calculate the corresponding wiped rate from upper body wiping movements to determine ... [more] IMQ2022-67 IE2022-144 MVE2022-97
pp.235-240
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