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All Technical Committee Conferences (Searched in: All Years)
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| Search Results: Conference Papers |
| Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| SDM |
2010-10-22
13:40 |
Miyagi |
Tohoku University |
Integration of Novel Non-porous Low-k Dielectric Fluorocarbon into Advanced Cu Interconnects
Xun Gu, Takenao Nemoto, Yugo Tomita, Akinobu Teramoto, Shin-Ichiro Kuroki, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.)  SDM2010-165 |
[more] |
SDM2010-165
pp.53-56 |
| SDM |
2009-10-29
15:30 |
Miyagi |
Tohoku University |
Silicon Wafer Thinning Technology for Three-Dimensional Integrated Circuit by Wet Etching
Kazuhiro Yoshikawa, Tomotsugu Ohashi, Tatsuro Yoshida, Takenao Nemoto, Tadahiro Ohmi (Tohoku Univ.) SDM2009-120 |
A three-dimensional integrated circuit is developed as an emerging technology in a semiconductor industry. The silicon w... [more] |
SDM2009-120
pp.15-19 |
| SDM |
2009-10-29
16:15 |
Miyagi |
Tohoku University |
Tribological Study for Low Shear Force CMP Process on Damascene Interconnects
Xun Gu, Takenao Nemoto (Tohoku Univ.), Yasa Adi Sampurno (Univ. of Arizona/Araca,Inc.), Jiang Cheng, Sian Theng (Araca,Inc.), Akinobu Teramoto (Tohoku Univ.), Ricardo Duyos Mateo, Leonard Borucki (Araca,Inc.), Yun Zhuang, Ara Philipossian (Univ. of Arizona/Araca,Inc.), Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2009-121 |
[more] |
SDM2009-121
pp.21-26 |
| SDM |
2008-10-09
13:30 |
Miyagi |
Tohoku Univ. |
Evaluation of Post Cu-CMP Cleaning Chemicals for Non-Porous Ultra Low-k Dielectric Fluorocarbon Film
Xun Gu, Takenao Nemoto, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) SDM2008-149 |
[more] |
SDM2008-149
pp.1-6 |
| SDM |
2008-10-09
14:00 |
Miyagi |
Tohoku Univ. |
Investigation of Novel End-Point-Detection for Ta/Cu CMP
Xun Gu, Takenao Nemoto (Tohoku Univ.), Ara Philipossian, Yasa Adi Sampurno (Univ. of Arizona/Araca), Jiang Cheng (Araca), Yun Zhuang (Univ. of Arizona/Araca), Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) SDM2008-150 |
[more] |
SDM2008-150
pp.7-12 |
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