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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ED |
2021-02-22 13:25 |
Online |
Online |
ED2020-39 |
A surface stress sensor fabricated by MEMS technology can detect biomacromolecules such as protein with label- free mann... [more] |
ED2020-39 pp.5-8 |
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM (Joint) [detail] |
2011-11-29 13:50 |
Miyazaki |
NewWelCity Miyazaki |
[Invited Talk]
Integrated CMOS-MEMS Technology and Its Applications Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90 |
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated compleme... [more] |
CPM2011-158 ICD2011-90 pp.47-52 |
SDM |
2009-11-12 15:30 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Development of MEMS and Equivalent Circuit Generator Nobuyo Fujiwara, Kazuo Asaumi (Mizuho Information & Research Institute), Tomoyuki Koike (Micromachine Center), Toshiyuki Tsuchiya (Kyoto Univ,), Gen Hashiguchi (Shizuoka Univ.) SDM2009-140 |
In order to improve CMOS-integrated MEMS(micro electromechanical system) devices design efficiency, we developed a desig... [more] |
SDM2009-140 pp.29-32 |
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