Paper Abstract and Keywords |
Presentation |
2006-08-07 16:15
Low temperature epitaxial growth of 3C-SiC on SOI substrate using Hot-Mesh CVD method Hitoshi Miura, Taishi Kurimoto, Yuichiro Kuroki, Kanji Yasui, Masasuke Takata, Tadashi Akahane (Nagaoka Univ. of Tech.) Link to ES Tech. Rep. Archives: CPM2006-46 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 106, no. 203, CPM2006-46, pp. 31-36, Aug. 2006. |
Paper # |
CPM2006-46 |
Date of Issue |
2006-07-31 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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Link to ES Tech. Rep. Archives: CPM2006-46 |
Conference Information |
Committee |
CPM |
Conference Date |
2006-08-07 - 2006-08-08 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Iwate Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Electronic Component Parts and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2006-08-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
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Title (in English) |
Low temperature epitaxial growth of 3C-SiC on SOI substrate using Hot-Mesh CVD method |
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1st Author's Name |
Hitoshi Miura |
1st Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
2nd Author's Name |
Taishi Kurimoto |
2nd Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
3rd Author's Name |
Yuichiro Kuroki |
3rd Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
4th Author's Name |
Kanji Yasui |
4th Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
5th Author's Name |
Masasuke Takata |
5th Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
6th Author's Name |
Tadashi Akahane |
6th Author's Affiliation |
Nagaoka University of Technology (Nagaoka Univ. of Tech.) |
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Speaker |
Author-1 |
Date Time |
2006-08-07 16:15:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2006-46 |
Volume (vol) |
vol.106 |
Number (no) |
no.203 |
Page |
pp.31-36 |
#Pages |
6 |
Date of Issue |
2006-07-31 (CPM) |