| Paper Abstract and Keywords |
| Presentation |
2006-08-08 11:25
Deposition of Large-area SmBa2Cu3O7-δ films by Magnetron Sputtering with Facing Targets
Koya Takahashi, Shingo Musashi, Yutaka Kimura, Shinji Kikuchi, Osamu Michikami (Iwate Univ.) |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We report a large-area deposition system for SmBa2Cu3O7-δ(SBCO) thin films by Magnetron Sputtering with Facing Targets(MSFT). SBCO films were deposited on R-Al2O3\CeO2 substrates in flowing Ar+O2 gas with various distance between two targets. We consider this distance is related to the condition of plasma which have an effect on superconducting properties. We found it is important to optimize Dtt and Ht-s in order to produce large-sized SBCO thin films with high quality by measuring thickness distribution of films, crystallinity, and superconducting properties. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
Magnetron Sputtering with Facing Targets / Distance between Facing Targets / Thickness Distribution of Films / The Condition of Plasma / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 106, no. 203, CPM2006-52, pp. 63-67, Aug. 2006. |
| Paper # |
CPM2006-52 |
| Date of Issue |
2006-07-31 (CPM) |
| ISSN |
Print edition: ISSN 0913-5685 |
| Download PDF |
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| Conference Information |
| Committee |
CPM |
| Conference Date |
2006-08-07 - 2006-08-08 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Iwate Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Electronic Component Parts and Materials, etc. |
| Paper Information |
| Registration To |
CPM |
| Conference Code |
2006-08-CPM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Deposition of Large-area SmBa2Cu3O7-δ films by Magnetron Sputtering with Facing Targets |
| Sub Title (in English) |
|
| Keyword(1) |
Magnetron Sputtering with Facing Targets |
| Keyword(2) |
Distance between Facing Targets |
| Keyword(3) |
Thickness Distribution of Films |
| Keyword(4) |
The Condition of Plasma |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Koya Takahashi |
| 1st Author's Affiliation |
Iwate University (Iwate Univ.) |
| 2nd Author's Name |
Shingo Musashi |
| 2nd Author's Affiliation |
Iwate University (Iwate Univ.) |
| 3rd Author's Name |
Yutaka Kimura |
| 3rd Author's Affiliation |
Iwate University (Iwate Univ.) |
| 4th Author's Name |
Shinji Kikuchi |
| 4th Author's Affiliation |
Iwate University (Iwate Univ.) |
| 5th Author's Name |
Osamu Michikami |
| 5th Author's Affiliation |
Iwate University (Iwate Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2006-08-08 11:25:00 |
| Presentation Time |
25 minutes |
| Registration for |
CPM |
| Paper # |
CPM2006-52 |
| Volume (vol) |
vol.106 |
| Number (no) |
no.203 |
| Page |
pp.63-67 |
| #Pages |
5 |
| Date of Issue |
2006-07-31 (CPM) |