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Paper Abstract and Keywords
Presentation 2007-11-16 14:20
Evaluation of the uniformity in the properties of ZnO transparent conductive films grown by rf magnetron sputtering with a grid electrode
Akira Asano (NUT), Hironori Katagiri (NNCT), Yuichiro Kuroki, Kanji Yasui, Masasuke Takata, Tadashi Akahane (NUT) CPM2007-108
Abstract (in Japanese) (See Japanese page) 
(in English) We have investigated the deposition of Al doped ZnO (AZO) films using a radio frequency (rf) magnetron sputtering apparatus with a mesh grid electrode. The improvement of the uniformity of crystallinity was achieved by the effect of the appropriate negative grid biases that suppress the impingement of charged particles onto the films surface. The uniformity of the electronic properties such as resistivity, carrier concentration and Hall mobility was also improved. These results that the distribution in the film resistivity with a mesh grid was reduced to 20% that of the AZO films deposited without the mesh grid.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO:Al / Transparent conducting oxide / sputtering / / / / /  
Reference Info. IEICE Tech. Rep., vol. 107, no. 325, CPM2007-108, pp. 19-22, Nov. 2007.
Paper # CPM2007-108 
Date of Issue 2007-11-09 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2007-108

Conference Information
Committee CPM  
Conference Date 2007-11-16 - 2007-11-17 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagaoka University of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process of Thin Film formation and Materials, etc. 
Paper Information
Registration To CPM 
Conference Code 2007-11-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of the uniformity in the properties of ZnO transparent conductive films grown by rf magnetron sputtering with a grid electrode 
Sub Title (in English)  
Keyword(1) ZnO:Al  
Keyword(2) Transparent conducting oxide  
Keyword(3) sputtering  
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1st Author's Name Akira Asano  
1st Author's Affiliation Nagaoka University of Technology (NUT)
2nd Author's Name Hironori Katagiri  
2nd Author's Affiliation Nagaoka National College of Techonlogy (NNCT)
3rd Author's Name Yuichiro Kuroki  
3rd Author's Affiliation Nagaoka University of Technology (NUT)
4th Author's Name Kanji Yasui  
4th Author's Affiliation Nagaoka University of Technology (NUT)
5th Author's Name Masasuke Takata  
5th Author's Affiliation Nagaoka University of Technology (NUT)
6th Author's Name Tadashi Akahane  
6th Author's Affiliation Nagaoka University of Technology (NUT)
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Speaker Author-1 
Date Time 2007-11-16 14:20:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2007-108 
Volume (vol) vol.107 
Number (no) no.325 
Page pp.19-22 
#Pages 4 
Date of Issue 2007-11-09 (CPM) 

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