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| Presentation | 2007-11-16 14:20 Evaluation of the uniformity in the properties of ZnO transparent conductive films grown by rf magnetron sputtering with a grid electrode Akira Asano (NUT), Hironori Katagiri (NNCT), Yuichiro Kuroki, Kanji Yasui, Masasuke Takata, Tadashi Akahane (NUT)  CPM2007-108 Link to ES Tech. Rep. Archives: CPM2007-108 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have investigated the deposition of Al doped ZnO (AZO) films using a radio frequency (rf) magnetron sputtering apparatus with a mesh grid electrode. The improvement of the uniformity of crystallinity was achieved by the effect of the appropriate negative grid biases that suppress the impingement of charged particles onto the films surface. The uniformity of the electronic properties such as resistivity, carrier concentration and Hall mobility was also improved. These results that the distribution in the film resistivity with a mesh grid was reduced to 20% that of the AZO films deposited without the mesh grid. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ZnO:Al / Transparent conducting oxide / sputtering / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 325, CPM2007-108, pp. 19-22, Nov. 2007. | |
| Paper # | CPM2007-108 | |
| Date of Issue | 2007-11-09 (CPM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | CPM2007-108 Link to ES Tech. Rep. Archives: CPM2007-108 |
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| Conference Information | |
| Committee | CPM |
| Conference Date | 2007-11-16 - 2007-11-17 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagaoka University of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process of Thin Film formation and Materials, etc. |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2007-11-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of the uniformity in the properties of ZnO transparent conductive films grown by rf magnetron sputtering with a grid electrode |
| Sub Title (in English) | |
| Keyword(1) | ZnO:Al |
| Keyword(2) | Transparent conducting oxide |
| Keyword(3) | sputtering |
| Keyword(4) | |
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| 1st Author's Name | Akira Asano |
| 1st Author's Affiliation | Nagaoka University of Technology (NUT) |
| 2nd Author's Name | Hironori Katagiri |
| 2nd Author's Affiliation | Nagaoka National College of Techonlogy (NNCT) |
| 3rd Author's Name | Yuichiro Kuroki |
| 3rd Author's Affiliation | Nagaoka University of Technology (NUT) |
| 4th Author's Name | Kanji Yasui |
| 4th Author's Affiliation | Nagaoka University of Technology (NUT) |
| 5th Author's Name | Masasuke Takata |
| 5th Author's Affiliation | Nagaoka University of Technology (NUT) |
| 6th Author's Name | Tadashi Akahane |
| 6th Author's Affiliation | Nagaoka University of Technology (NUT) |
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| Speaker | Author-1 |
| Date Time | 2007-11-16 14:20:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | CPM2007-108 |
| Volume (vol) | vol.107 |
| Number (no) | no.325 |
| Page | pp.19-22 |
| #Pages | 4 |
| Date of Issue | 2007-11-09 (CPM) |
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