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Paper Abstract and Keywords
Presentation 2008-05-15 13:00
Effect of doughnut-type plate on crystal properties of LiMn2O4 films prepared by RF magnetron sputtering
Takayuki Hosokawa, Kouichi Nakamura, Shunsuke Hosoe, Satoshi Sakai, Masaaki Isai (Shizuoka Univ.) ED2008-1 CPM2008-9 SDM2008-21
Abstract (in Japanese) (See Japanese page) 
(in English) The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. The LiMn2O4 powder was used as a target material. This research was designed for preventing the target material being oxidized during the reactive sputtering. A doughnut plate was inserted between substrate and target. The deposition rate, XRD, and surface morphology were investigated as a function of doughnut-aperture size. It was found that the deposition rate had a maximum value under the doughnut-aperture of 30mm. It was also found that the plate was effective to inhibit oxidation of target material.
Keyword (in Japanese) (See Japanese page) 
(in English) LiMn2O4 thin film / RF magnetron sputtering / Li secondary batteries / / / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 35, CPM2008-9, pp. 1-6, May 2008.
Paper # CPM2008-9 
Date of Issue 2008-05-08 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2008-1 CPM2008-9 SDM2008-21

Conference Information
Committee CPM ED SDM  
Conference Date 2008-05-15 - 2008-05-16 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Crystal growth, evaluation and device (Compound, Si, SiGe, Electronic and light emitting materials） 
Paper Information
Registration To CPM 
Conference Code 2008-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effect of doughnut-type plate on crystal properties of LiMn2O4 films prepared by RF magnetron sputtering 
Sub Title (in English)  
Keyword(1) LiMn2O4 thin film  
Keyword(2) RF magnetron sputtering  
Keyword(3) Li secondary batteries  
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1st Author's Name Takayuki Hosokawa  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Kouichi Nakamura  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Shunsuke Hosoe  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Satoshi Sakai  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Masaaki Isai  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2008-05-15 13:00:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # ED2008-1, CPM2008-9, SDM2008-21 
Volume (vol) vol.108 
Number (no) no.34(ED), no.35(CPM), no.36(SDM) 
Page pp.1-6 
#Pages 6 
Date of Issue 2008-05-08 (ED, CPM, SDM) 

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