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Paper Abstract and Keywords
Presentation 2008-10-30 13:00
Preparation and Characterization of CuInS2 Films by Reactive Sputtering Method
Takuya Yamaguchi, Nozomu Tsuboi (Niigata Univ.), Koichiro Oishi (Nagaoka Nat. Coll. of Tech.), Satoshi Kobayashi, Futao Kaneko (Niigata Univ.) CPM2008-75 Link to ES Tech. Rep. Archives: CPM2008-75
Abstract (in Japanese) (See Japanese page) 
(in English) CuInS2 films with various [Cu]/[In] ratios were deposited on soda lime glass substrates at 450 C by sputtering alternatively Cu and In targets under Ar-diluted CS2 (CS2: 2-5 mTorr) atmosphere. Composition of the films deposited under high and low CS2 pressures corresponded to the (Cu2S,Cu1.96S)-(CuInS2)-(CuIn5S8)-(In2S3) system line and the (Cu2S,Cu1.96S)-(CuInS2)-(InS,In5S4) system line, respectively. The smooth surface films with the stoichiometric composition of CuInS2 exhibited the CuInS2 XRD lines only, and had the absorption edge corresponding to the energy gap of CuInS2 and p-type conductivity.
Keyword (in Japanese) (See Japanese page) 
(in English) Thin Film Solar Cell Material / CuInS2 / Reactive Sputtering / Compound Semiconductor / Thin Film / / /  
Reference Info. IEICE Tech. Rep., vol. 108, no. 269, CPM2008-75, pp. 1-6, Oct. 2008.
Paper # CPM2008-75 
Date of Issue 2008-10-23 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2008-75 Link to ES Tech. Rep. Archives: CPM2008-75

Conference Information
Committee CPM  
Conference Date 2008-10-30 - 2008-10-31 
Place (in Japanese) (See Japanese page) 
Place (in English) Niigata Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process of Thin Film formation and Materials, etc. 
Paper Information
Registration To CPM 
Conference Code 2008-10-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation and Characterization of CuInS2 Films by Reactive Sputtering Method 
Sub Title (in English)  
Keyword(1) Thin Film Solar Cell Material  
Keyword(2) CuInS2  
Keyword(3) Reactive Sputtering  
Keyword(4) Compound Semiconductor  
Keyword(5) Thin Film  
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1st Author's Name Takuya Yamaguchi  
1st Author's Affiliation Niigata University (Niigata Univ.)
2nd Author's Name Nozomu Tsuboi  
2nd Author's Affiliation Niigata University (Niigata Univ.)
3rd Author's Name Koichiro Oishi  
3rd Author's Affiliation Nagaoka National College of Technology (Nagaoka Nat. Coll. of Tech.)
4th Author's Name Satoshi Kobayashi  
4th Author's Affiliation Niigata University (Niigata Univ.)
5th Author's Name Futao Kaneko  
5th Author's Affiliation Niigata University (Niigata Univ.)
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Speaker Author-1 
Date Time 2008-10-30 13:00:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2008-75 
Volume (vol) vol.108 
Number (no) no.269 
Page pp.1-6 
#Pages
Date of Issue 2008-10-23 (CPM) 


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