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Paper Abstract and Keywords
Presentation 2009-10-29 17:15
Statistical Analysis of Random Telegraph Signal Using a Large-Scale Array TEG with a Long Time Measurement
Takafumi Fujisawa, Kenichi Abe, Syunichi Watabe, Naoto Miyamoto, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2009-123
Abstract (in Japanese) (See Japanese page) 
(in English) For the development of miniaturizing MOSFET and manufacturing low noise devices, it is important to suppress RTS noise. In this report, we measured the gate bias voltage dependence of RTS characteristic with large-scale array test pattern that we are able to evaluate a large number of RTS characteristic in a short time. The amplitude increases and the time constant ratio increases as gate bias voltage decreases. We discuss the energy level of traps in an insulator film with the gate bias voltage dependence of time constant ratio. Extraction time constant ratio is useful for determination of the energy level of traps.
Keyword (in Japanese) (See Japanese page) 
(in English) MOSFET / variability / Random Telegraph Signal(RTS) / time constant / trap / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 257, SDM2009-123, pp. 31-36, Oct. 2009.
Paper # SDM2009-123 
Date of Issue 2009-10-22 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2009-10-29 - 2009-10-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Semiconductor process science and new technology 
Paper Information
Registration To SDM 
Conference Code 2009-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Statistical Analysis of Random Telegraph Signal Using a Large-Scale Array TEG with a Long Time Measurement 
Sub Title (in English)  
Keyword(1) MOSFET  
Keyword(2) variability  
Keyword(3) Random Telegraph Signal(RTS)  
Keyword(4) time constant  
Keyword(5) trap  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Takafumi Fujisawa  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Kenichi Abe  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Syunichi Watabe  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Naoto Miyamoto  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Akinobu Teramoto  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
6th Author's Name Shigetoshi Sugawa  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Tadahiro Ohmi  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2009-10-29 17:15:00 
Presentation Time 30 minutes 
Registration for SDM 
Paper # SDM2009-123 
Volume (vol) vol.109 
Number (no) no.257 
Page pp.31-36 
#Pages 6 
Date of Issue 2009-10-22 (SDM) 

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