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| Presentation | 2010-07-29 14:55 Epitaxial growth of ZnO films using hot water molecules generated by catalytic reaction Masami Tahara, Hitoshi Miura, Tomoyoshi Kuroda, Hiroshi Nishiyama, Kanji Yasui (Nagoka Univ. of Tech.)  CPM2010-33 Link to ES Tech. Rep. Archives: CPM2010-33 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have developed a new CVD method for thin film growth of metal oxides using a reaction between organometallic compounds and high-energy H2O produced by a Pt-catalyzed H2O2 reaction. Using this CVD method, epitaxial growth of ZnO films on sapphire substrates was investigated. ZnO epitaxial films were grown directly on a-plane (11-20) sapphire substrates at substrate temperatures of 573-873 K without buffer layer. X-ray diffraction patterns exhibited intense (0002) and (0004) peaks from the ZnO(0001) index plane. The smallest full width at half maximum (FWHM) value of the ω-rocking curve of ZnO(0002) was less than 0.1deg (273 arcsec). The Hall mobility and residual carrier concentration of the epilayers were in the ranges 140-168 cm2V1s1 and 1.6-6×1017 cm3, respectively. Optical transparency of the ZnO samples grown on the sapphire substrates was more than 95% that of the sample without ZnO film. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | ZnO / catalytic reaction / high-energy H2O / X-ray diffraction pattern / Hall mobility / optical transparency / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 154, CPM2010-33, pp. 11-15, July 2010. | |
| Paper # | CPM2010-33 | |
| Date of Issue | 2010-07-22 (CPM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | CPM2010-33 Link to ES Tech. Rep. Archives: CPM2010-33 |
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| Conference Information | |
| Committee | CPM |
| Conference Date | 2010-07-29 - 2010-07-30 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Michino-Eki Shari Meeting Room |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2010-07-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Epitaxial growth of ZnO films using hot water molecules generated by catalytic reaction |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | catalytic reaction |
| Keyword(3) | high-energy H2O |
| Keyword(4) | X-ray diffraction pattern |
| Keyword(5) | Hall mobility |
| Keyword(6) | optical transparency |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masami Tahara |
| 1st Author's Affiliation | Nagaok University of Technology (Nagoka Univ. of Tech.) |
| 2nd Author's Name | Hitoshi Miura |
| 2nd Author's Affiliation | Nagaok University of Technology (Nagoka Univ. of Tech.) |
| 3rd Author's Name | Tomoyoshi Kuroda |
| 3rd Author's Affiliation | Nagaok University of Technology (Nagoka Univ. of Tech.) |
| 4th Author's Name | Hiroshi Nishiyama |
| 4th Author's Affiliation | Nagaok University of Technology (Nagoka Univ. of Tech.) |
| 5th Author's Name | Kanji Yasui |
| 5th Author's Affiliation | Nagaok University of Technology (Nagoka Univ. of Tech.) |
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| Speaker | Author-5 |
| Date Time | 2010-07-29 14:55:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | CPM2010-33 |
| Volume (vol) | vol.110 |
| Number (no) | no.154 |
| Page | pp.11-15 |
| #Pages | 5 |
| Date of Issue | 2010-07-22 (CPM) |
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