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Paper Abstract and Keywords
Presentation 2011-10-26 13:50
Properties of AZO Thin Films Deposited at Room Temperature by the RF-DC Coupled Magnetron Sputtering Method
Jun Kashiide, Katsuhito Nagoshi, Yusuke Tomiguchi, Hidehiko Shimizu, Haruo Iwano, Takahiro Kawakami, Kotaro Nagata, Yasuo Fukushima, Nozomu Tsuboi, Takahiro Nomoto (Niigata Univ.) CPM2011-111
Abstract (in Japanese) (See Japanese page) 
(in English) In order to examine that influence of low voltage sputtering method on properties of AZO thin films, deposition of AZO thin films was attempted at the room temperature by the RF-DC coupled magnetron sputtering method. As a result, crystallinity and electrical properties of AZO thin films deposited by low voltage sputtering method were small changes in substrate positions compared with properties of AZO thin films deposited by DC magnetron sputtering method. Therefore, it was thought that RF-DC coupled magnetron sputtering method was a useful technique for improvements of the characteristic change in the film plane direction.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO thin films / RF-DC coupled MS method / crystallinity / Erosion / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 264, CPM2011-111, pp. 11-15, Oct. 2011.
Paper # CPM2011-111 
Date of Issue 2011-10-19 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee CPM  
Conference Date 2011-10-26 - 2011-10-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Fukui Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2011-10-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Properties of AZO Thin Films Deposited at Room Temperature by the RF-DC Coupled Magnetron Sputtering Method 
Sub Title (in English)  
Keyword(1) ZnO thin films  
Keyword(2) RF-DC coupled MS method  
Keyword(3) crystallinity  
Keyword(4) Erosion  
Keyword(5)  
Keyword(6)  
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Keyword(8)  
1st Author's Name Jun Kashiide  
1st Author's Affiliation Niigata University (Niigata Univ.)
2nd Author's Name Katsuhito Nagoshi  
2nd Author's Affiliation Niigata University (Niigata Univ.)
3rd Author's Name Yusuke Tomiguchi  
3rd Author's Affiliation Niigata University (Niigata Univ.)
4th Author's Name Hidehiko Shimizu  
4th Author's Affiliation Niigata University (Niigata Univ.)
5th Author's Name Haruo Iwano  
5th Author's Affiliation Niigata University (Niigata Univ.)
6th Author's Name Takahiro Kawakami  
6th Author's Affiliation Niigata University (Niigata Univ.)
7th Author's Name Kotaro Nagata  
7th Author's Affiliation Niigata University (Niigata Univ.)
8th Author's Name Yasuo Fukushima  
8th Author's Affiliation Niigata University (Niigata Univ.)
9th Author's Name Nozomu Tsuboi  
9th Author's Affiliation Niigata University (Niigata Univ.)
10th Author's Name Takahiro Nomoto  
10th Author's Affiliation Niigata University (Niigata Univ.)
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Speaker Author-1 
Date Time 2011-10-26 13:50:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2011-111 
Volume (vol) vol.111 
Number (no) no.264 
Page pp.11-15 
#Pages 5 
Date of Issue 2011-10-19 (CPM) 

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