| Paper Abstract and Keywords |
| Presentation |
2011-11-10 13:00
[Invited Talk]
Phase-change memoy driven by poly-Si transistor enabling three-dimensional stacking Yoshitaka Sasago, Masaharu Kinoshita, Hiroyuki Minemura, Yumiko Anzai, Mitsuharu Tai, Kenzo Kurotsuchi, Seiichi Morita, Toshikazu Takahashi, Takashi Takahama, Tadao Morimoto, Toshiyuki Mine, Akio Shima, Takashi Kobayashi (Hitachi) SDM2011-117 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
A phase-change memory (PCM) driven by poly-Si MOS transistors was fabricated. The thin phase-change-material layer deposited directly on the channel silicon layer in the PCM enables low-current reset operation (45 μA). A con-tactless simple cell structure makes it possible to reduce the cell size to 4F2 and the number of process steps. This memory-cell configuration enables both a poly-Si MOS-driven stackable memory array and large degree programming parallelization. Both low cost and gigabyte-per-second programming throughput are thus made possible by this stackable phase-change memory. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
phase-change memory / poly-Si MOS transistor / stackable / three-dimensional / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 111, no. 281, SDM2011-117, pp. 11-15, Nov. 2011. |
| Paper # |
SDM2011-117 |
| Date of Issue |
2011-11-03 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
SDM2011-117 |
| Conference Information |
| Committee |
SDM |
| Conference Date |
2011-11-10 - 2011-11-11 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Process, Device, Circuit Simulations, etc |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2011-11-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Phase-change memoy driven by poly-Si transistor enabling three-dimensional stacking |
| Sub Title (in English) |
|
| Keyword(1) |
phase-change memory |
| Keyword(2) |
poly-Si MOS transistor |
| Keyword(3) |
stackable |
| Keyword(4) |
three-dimensional |
| Keyword(5) |
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| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Yoshitaka Sasago |
| 1st Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 2nd Author's Name |
Masaharu Kinoshita |
| 2nd Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 3rd Author's Name |
Hiroyuki Minemura |
| 3rd Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 4th Author's Name |
Yumiko Anzai |
| 4th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 5th Author's Name |
Mitsuharu Tai |
| 5th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 6th Author's Name |
Kenzo Kurotsuchi |
| 6th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 7th Author's Name |
Seiichi Morita |
| 7th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 8th Author's Name |
Toshikazu Takahashi |
| 8th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 9th Author's Name |
Takashi Takahama |
| 9th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 10th Author's Name |
Tadao Morimoto |
| 10th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 11th Author's Name |
Toshiyuki Mine |
| 11th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 12th Author's Name |
Akio Shima |
| 12th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
| 13th Author's Name |
Takashi Kobayashi |
| 13th Author's Affiliation |
Hitachi Ltd. (Hitachi) |
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| Speaker |
Author-1 |
| Date Time |
2011-11-10 13:00:00 |
| Presentation Time |
50 minutes |
| Registration for |
SDM |
| Paper # |
SDM2011-117 |
| Volume (vol) |
vol.111 |
| Number (no) |
no.281 |
| Page |
pp.11-15 |
| #Pages |
5 |
| Date of Issue |
2011-11-03 (SDM) |