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Paper Abstract and Keywords
Presentation 2012-06-22 14:45
Characteristics of ZnO films grown on glass substrates using high-energy H2O generated by a catalytic reaction -- Effect of a sputter deposited buffer layer --
Takahiro Oyanagi, Souichi Satomoto, Kai Sato, Takahiro Kato (Nagaoka Univ. Technol.), Hironori Katagiri, Kazuo Jimbo (Nagaoka Nat. College Technol.), Kanji Yasui (Nagaoka Univ. Technol.) EMD2012-10 CPM2012-27 OME2012-34
Abstract (in Japanese) (See Japanese page) 
(in English) ZnO thin films were grown through a reaction between dimethylzinc and high-energy H_2O produced by a Pt-catalyzed H_2 O_2 reaction. For the application of transparent conductive thin films, the ZnO films were grown on glass substrates with and without sputtered buffer layers deposited at 250˚C. By the insertion of the buffer layer with an appropriate thickness, crystal orientation along c-axis was improved. Optical transparency and electrical resistivity were also improved by the insertion of the buffer layer.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO / catalytic reaction / CVD / glass substrate / X-ray diffraction / optical transparency / resistivity /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 96, CPM2012-27, pp. 13-18, June 2012.
Paper # CPM2012-27 
Date of Issue 2012-06-15 (EMD, CPM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMD2012-10 CPM2012-27 OME2012-34

Conference Information
Committee EMD CPM OME  
Conference Date 2012-06-22 - 2012-06-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Summer meeting for materials and devices 
Paper Information
Registration To CPM 
Conference Code 2012-06-EMD-CPM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Characteristics of ZnO films grown on glass substrates using high-energy H2O generated by a catalytic reaction 
Sub Title (in English) Effect of a sputter deposited buffer layer 
Keyword(1) ZnO  
Keyword(2) catalytic reaction  
Keyword(3) CVD  
Keyword(4) glass substrate  
Keyword(5) X-ray diffraction  
Keyword(6) optical transparency  
Keyword(7) resistivity  
Keyword(8)  
1st Author's Name Takahiro Oyanagi  
1st Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
2nd Author's Name Souichi Satomoto  
2nd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
3rd Author's Name Kai Sato  
3rd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
4th Author's Name Takahiro Kato  
4th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
5th Author's Name Hironori Katagiri  
5th Author's Affiliation Nagaoka National College of Technology (Nagaoka Nat. College Technol.)
6th Author's Name Kazuo Jimbo  
6th Author's Affiliation Nagaoka National College of Technology (Nagaoka Nat. College Technol.)
7th Author's Name Kanji Yasui  
7th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. Technol.)
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Speaker Author-1 
Date Time 2012-06-22 14:45:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # EMD2012-10, CPM2012-27, OME2012-34 
Volume (vol) vol.112 
Number (no) no.95(EMD), no.96(CPM), no.97(OME) 
Page pp.13-18 
#Pages 6 
Date of Issue 2012-06-15 (EMD, CPM, OME) 

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