Paper Abstract and Keywords |
Presentation |
2012-10-26 13:50
Effect of a low-temperature buffer layer on the properties of ZnO films grown on glass substrates using catalytically generated high-energy H2O Takahiro Oyanagi, Kazuki Takezawa, Takahiro Kato (Nagaoka Univ. Technol), Hironori Katagiri, Kazuo Jimbo (NNCT), Kanji Yasui (Nagaoka Univ. Technol) CPM2012-94 Link to ES Tech. Rep. Archives: CPM2012-94 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
ZnO thin films were grown through a reaction between dimethylzinc and high-energy H_{2}O produced by a Pt-catalyzed H_{2}-O_{2} reaction. For the application of transparent conductive thin films, the ZnO films were grown on glass substrates with and without low temperature buffer layers deposited at 200˚C. Although crystal orientation along c-axis was not improved by the insertion of the buffer layer, Hall mobility was improved. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
ZnO / catalytic reaction / CVD / surface morphology / optical transparency / resistivity / / |
Reference Info. |
IEICE Tech. Rep., vol. 112, no. 265, CPM2012-94, pp. 7-11, Oct. 2012. |
Paper # |
CPM2012-94 |
Date of Issue |
2012-10-19 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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CPM2012-94 Link to ES Tech. Rep. Archives: CPM2012-94 |