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Paper Abstract and Keywords
Presentation 2013-06-21 16:35
Effect of N2O doping on the properties of ZnO thin films grown using high-energy H2O generated by a catalytic reaction
Naoya Yamaguchi, Yuki Ohashi, Eichi Nagatomi, Yasuhiro Tamayama, Takahiro Kato, Kanji Yasui (Nagaoka Univ. of Tech.) EMD2013-22 CPM2013-37 OME2013-45
Abstract (in Japanese) (See Japanese page) 
(in English) ZnO films were grown using a reaction between an alkylzinc (DMZn) gas and high-energy H2O, the latter is generated by a Pt-catalyzed exothermic H2-O2 reaction. During the film growth, N2O gas was added in the reaction zone. In this study, the influence of the N2O gas supply during the film growth on the properties of the ZnO films was investigated. The ZnO epitaxial films were directly grown on a-Al2O3 substrates at a substrate temperature of 773K for 60 min without any buffer layer. Although all films showed an n-type character, the electron mobility of N2O doped (3.2×10^-3 Pa) film at RT (290 K) was 234 cm2/Vs, while that of non-doped ZnO film was 207 cm2/Vs. The mobility of the N2O doped film (234 cm2/Vs at RT) increases to 1100 cm2/Vs at 100 K. Electron concentrations at RT of all films were 4-6×10^16 cm-3. It was considered that a part of the nitrogen acceptor compensated the donor impurities and the intrinsic donor impurities caused by the defects were also reduced by the nitrogen atoms in view of the small electron concentration and the large electron mobility for N2O doped ZnO films.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO / catalytic reaction / high-energy H2O / N2O dope / Hall mobility / PL spectra / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 97, CPM2013-37, pp. 83-87, June 2013.
Paper # CPM2013-37 
Date of Issue 2013-06-14 (EMD, CPM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMD2013-22 CPM2013-37 OME2013-45

Conference Information
Committee EMD CPM OME  
Conference Date 2013-06-21 - 2013-06-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Summer meeting for materials and devices 
Paper Information
Registration To CPM 
Conference Code 2013-06-EMD-CPM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effect of N2O doping on the properties of ZnO thin films grown using high-energy H2O generated by a catalytic reaction 
Sub Title (in English)  
Keyword(1) ZnO  
Keyword(2) catalytic reaction  
Keyword(3) high-energy H2O  
Keyword(4) N2O dope  
Keyword(5) Hall mobility  
Keyword(6) PL spectra  
Keyword(7)  
Keyword(8)  
1st Author's Name Naoya Yamaguchi  
1st Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
2nd Author's Name Yuki Ohashi  
2nd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
3rd Author's Name Eichi Nagatomi  
3rd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
4th Author's Name Yasuhiro Tamayama  
4th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
5th Author's Name Takahiro Kato  
5th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
6th Author's Name Kanji Yasui  
6th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
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Speaker Author-1 
Date Time 2013-06-21 16:35:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper # EMD2013-22, CPM2013-37, OME2013-45 
Volume (vol) vol.113 
Number (no) no.96(EMD), no.97(CPM), no.98(OME) 
Page pp.83-87 
#Pages 5 
Date of Issue 2013-06-14 (EMD, CPM, OME) 

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