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Paper Abstract and Keywords
Presentation 2014-12-12 15:45
Porous Silicon 3D micro structure formation by strain-induced self-rolling by porosity control
Keita Ishiguro, Masaki Denokami, Kanna Aoki, Minoru Fujii (Kobe Univ.) EID2014-31 SDM2014-126
Abstract (in Japanese) (See Japanese page) 
(in English) Silicon (Si) is not only the basis of electronic devices, but also established as a basic material of various devices, especially in the field of Micro-Electro-Mechanical-Systems (MEMS), such as Digital Mirror Device (DMD) built in an image projector, an inkjet printer head, motion sensors of a smartphone, and so on. Compact and highly-functional MEMS devices have been seamlessly realized with the development of Si micromachining technology. However, three-dimensional (3D) processing technique which allows more advanced integration and wide range mobility is not yet established. In this study, we propose a new shaping method of Si into micro circular curvature structures utilizing porosity-controlled porous silicon membrane and steam oxidation. This is a simple, costless, and mass producible new 3D micro processing technique of Si.
Keyword (in Japanese) (See Japanese page) 
(in English) Self-rolled-up / Porous silicon tube / MEMS / Lab-on-a-chip / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 360, SDM2014-126, pp. 95-98, Dec. 2014.
Paper # SDM2014-126 
Date of Issue 2014-12-05 (EID, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EID2014-31 SDM2014-126

Conference Information
Committee SDM EID  
Conference Date 2014-12-12 - 2014-12-12 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyoto University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Si and Si-related Materials and Devices, Display Technology 
Paper Information
Registration To SDM 
Conference Code 2014-12-SDM-EID 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Porous Silicon 3D micro structure formation by strain-induced self-rolling by porosity control 
Sub Title (in English)  
Keyword(1) Self-rolled-up  
Keyword(2) Porous silicon tube  
Keyword(3) MEMS  
Keyword(4) Lab-on-a-chip  
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Keyword(6)  
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1st Author's Name Keita Ishiguro  
1st Author's Affiliation Kobe University (Kobe Univ.)
2nd Author's Name Masaki Denokami  
2nd Author's Affiliation Kobe University (Kobe Univ.)
3rd Author's Name Kanna Aoki  
3rd Author's Affiliation Kobe University (Kobe Univ.)
4th Author's Name Minoru Fujii  
4th Author's Affiliation Kobe University (Kobe Univ.)
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Speaker Author-1 
Date Time 2014-12-12 15:45:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # EID2014-31, SDM2014-126 
Volume (vol) vol.114 
Number (no) no.359(EID), no.360(SDM) 
Page pp.95-98 
#Pages 4 
Date of Issue 2014-12-05 (EID, SDM) 

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