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Paper Abstract and Keywords
Presentation 2014-12-12 14:15
Crystallization of Germanium Film with (111) Orientation on Amorphous Substrate by Laser Annealing
Toru Takao, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka (NAIST) EID2014-26 SDM2014-121
Abstract (in Japanese) (See Japanese page) 
(in English) Single-grain Germanium (Ge) on amorphous substrate is required to realize the flexible system on panel display. Stripe-patterned Ge films were fabricated on SiO2 with Si seed and crystallized by green laser annealing. Ge films were evaluated by electron backscatter diffraction (EBSD). The results indicated that Ge films were crystallized with (111) orientation when the fluence was 675 mJ/cm2 and the scan speed was 150 µm/s. In addition, crystallinity dependence on laser fluence and width of Ge stripes was examined. The results indicated that crystallization with (111) orientation can be realized at a low fluence when the width of stripes is reduced.
Keyword (in Japanese) (See Japanese page) 
(in English) Germanium / Laser annealing / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 360, SDM2014-121, pp. 67-71, Dec. 2014.
Paper # SDM2014-121 
Date of Issue 2014-12-05 (EID, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EID2014-26 SDM2014-121

Conference Information
Committee SDM EID  
Conference Date 2014-12-12 - 2014-12-12 
Place (in Japanese) (See Japanese page) 
Place (in English) Kyoto University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Si and Si-related Materials and Devices, Display Technology 
Paper Information
Registration To SDM 
Conference Code 2014-12-SDM-EID 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Crystallization of Germanium Film with (111) Orientation on Amorphous Substrate by Laser Annealing 
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Keyword(1) Germanium  
Keyword(2) Laser annealing  
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1st Author's Name Toru Takao  
1st Author's Affiliation Nara Institute of Science and Technology (NAIST)
2nd Author's Name Masahiro Horita  
2nd Author's Affiliation Nara Institute of Science and Technology (NAIST)
3rd Author's Name Yasuaki Ishikawa  
3rd Author's Affiliation Nara Institute of Science and Technology (NAIST)
4th Author's Name Yukiharu Uraoka  
4th Author's Affiliation Nara Institute of Science and Technology (NAIST)
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Speaker Author-1 
Date Time 2014-12-12 14:15:00 
Presentation Time 15 minutes 
Registration for SDM 
Paper # EID2014-26, SDM2014-121 
Volume (vol) vol.114 
Number (no) no.359(EID), no.360(SDM) 
Page pp.67-71 
#Pages 5 
Date of Issue 2014-12-05 (EID, SDM) 

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