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| Presentation | 2016-01-20 11:20 [Invited Lecture] State-of-the-art technology of gallium oxide power devices Masataka Higashiwaki, Man Hoi Wong, Keita Konishi (NICT), Kohei Sasaki (Tamura/NICT), Ken Goto (Tamura/TAT), Kazushiro Nomura, Quang Tu Thieu, Rie Togashi, Hisashi Murakami, Yoshinao Kumagai, Bo Monemar, Akinori Koukitu (TAT), Akito Kuramata, Takekazu Masui, Shigenobu Yamakoshi (Tamura)  ED2015-114 Link to ES Tech. Rep. Archives: ED2015-114 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Gallium oxide (Ga{$_{2}$}O{$_{3}$}) is one of oxide semiconductors and has excellent material properties for power device applications. Another important advantage of Ga{$_{2}$}O{$_{3}$} is that large-area and high-quality wafers can be produced with simple and low-cost methods. From these features, Ga{$_{2}$}O{$_{3}$} has been attracting much attention as a new wide bandgap semiconductor following SiC and GaN. In this report, we introduce recent main progress of field-plated lateral Ga{$_{2}$}O{$_{3}$} metal-oxide-semiconductor field-effect transistors and vertical Ga{$_{2}$}O{$_{3}$} Schottky barrier diodes with drift layers grown by halide vapor phase epitaxy. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | gallium oxide / field plate / metal-oxide-semiconductor field-effect transistor (MOSFET) / halide vapor phase epitaxy / Schottky barrier diode / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 115, no. 402, ED2015-114, pp. 13-18, Jan. 2016. | |
| Paper # | ED2015-114 | |
| Date of Issue | 2016-01-13 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2015-114 Link to ES Tech. Rep. Archives: ED2015-114 |
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| Conference Information | |
| Committee | ED |
| Conference Date | 2016-01-20 - 2016-01-20 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Power Devices and High-frequency Devices, Microwave, etc. |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2016-01-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | State-of-the-art technology of gallium oxide power devices |
| Sub Title (in English) | |
| Keyword(1) | gallium oxide |
| Keyword(2) | field plate |
| Keyword(3) | metal-oxide-semiconductor field-effect transistor (MOSFET) |
| Keyword(4) | halide vapor phase epitaxy |
| Keyword(5) | Schottky barrier diode |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masataka Higashiwaki |
| 1st Author's Affiliation | National Institute of Information and Communications Technology (NICT) |
| 2nd Author's Name | Man Hoi Wong |
| 2nd Author's Affiliation | National Institute of Information and Communications Technology (NICT) |
| 3rd Author's Name | Keita Konishi |
| 3rd Author's Affiliation | National Institute of Information and Communications Technology (NICT) |
| 4th Author's Name | Kohei Sasaki |
| 4th Author's Affiliation | Tamura Corporation/National Institute of Information and Communications Technology (Tamura/NICT) |
| 5th Author's Name | Ken Goto |
| 5th Author's Affiliation | Tamura Corporation/Tokyo University of Agriculture and Technology (Tamura/TAT) |
| 6th Author's Name | Kazushiro Nomura |
| 6th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 7th Author's Name | Quang Tu Thieu |
| 7th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 8th Author's Name | Rie Togashi |
| 8th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 9th Author's Name | Hisashi Murakami |
| 9th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 10th Author's Name | Yoshinao Kumagai |
| 10th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 11th Author's Name | Bo Monemar |
| 11th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 12th Author's Name | Akinori Koukitu |
| 12th Author's Affiliation | Tokyo University of Agriculture and Technology (TAT) |
| 13th Author's Name | Akito Kuramata |
| 13th Author's Affiliation | Tamura Corporation (Tamura) |
| 14th Author's Name | Takekazu Masui |
| 14th Author's Affiliation | Tamura Corporation (Tamura) |
| 15th Author's Name | Shigenobu Yamakoshi |
| 15th Author's Affiliation | Tamura Corporation (Tamura) |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2016-01-20 11:20:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2015-114 |
| Volume (vol) | vol.115 |
| Number (no) | no.402 |
| Page | pp.13-18 |
| #Pages | 6 |
| Date of Issue | 2016-01-13 (ED) |
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