| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2016-10-26 14:50 Formation technology of Flat Surface after Selective Epitaxial Growth on Ion-Implanted (100) Oriented Thin SOI Wafers Kiichi Furukawa, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Keiichi Hashimoto, Shigetoshi Sugawa (Tohoku Univ.), Daisuke Suzuki, Yoichiro Chiba, Katsutoshi Ishii, Akira Shimizu, Kazuhide Hasebe (Tokyo Electron Tohoku)  SDM2016-70 Link to ES Tech. Rep. Archives: SDM2016-70 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 116, no. 270, SDM2016-70, pp. 9-14, Oct. 2016. | |
| Paper # | SDM2016-70 | |
| Date of Issue | 2016-10-19 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2016-70 Link to ES Tech. Rep. Archives: SDM2016-70 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2016-10-26 - 2016-10-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2016-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation technology of Flat Surface after Selective Epitaxial Growth on Ion-Implanted (100) Oriented Thin SOI Wafers |
| Sub Title (in English) | |
| Keyword(1) | |
| Keyword(2) | |
| Keyword(3) | |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kiichi Furukawa |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Akinobu Teramoto |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Rihito Kuroda |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Tomoyuki Suwa |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 5th Author's Name | Keiichi Hashimoto |
| 5th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 6th Author's Name | Shigetoshi Sugawa |
| 6th Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 7th Author's Name | Daisuke Suzuki |
| 7th Author's Affiliation | Tokyo Electron Tohoku Limited Yamanashi Regional Office (Tokyo Electron Tohoku) |
| 8th Author's Name | Yoichiro Chiba |
| 8th Author's Affiliation | Tokyo Electron Tohoku Limited Yamanashi Regional Office (Tokyo Electron Tohoku) |
| 9th Author's Name | Katsutoshi Ishii |
| 9th Author's Affiliation | Tokyo Electron Tohoku Limited Yamanashi Regional Office (Tokyo Electron Tohoku) |
| 10th Author's Name | Akira Shimizu |
| 10th Author's Affiliation | Tokyo Electron Tohoku Limited Yamanashi Regional Office (Tokyo Electron Tohoku) |
| 11th Author's Name | Kazuhide Hasebe |
| 11th Author's Affiliation | Tokyo Electron Tohoku Limited Yamanashi Regional Office (Tokyo Electron Tohoku) |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2016-10-26 14:50:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2016-70 |
| Volume (vol) | vol.116 |
| Number (no) | no.270 |
| Page | pp.9-14 |
| #Pages | 6 |
| Date of Issue | 2016-10-19 (SDM) |
[Return to Top Page]