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Paper Abstract and Keywords
Presentation
2018-06-25 14:30
[Invited Lecture] Recent progress and problem of Diamond device: Crystal quality of bulk and surface
Yukako Kato
(
AIST
),
Kouhei Takizawa
(
Tokyo City Univ.
),
Toshiharu Makino
,
Hiromitsu Kato
,
Masahiko Ogura
,
Daisuke Takeuchi
,
Satoshi Yamasaki
(
AIST
),
Hiroshi Nohira
(
Tokyo City Univ.
)
Abstract
(in Japanese)
(See Japanese page)
(in English)
(Not available yet)
Keyword
(in Japanese)
(See Japanese page)
(in English)
/ / / / / / /
Reference Info.
IEICE Tech. Rep.
Paper #
Date of Issue
ISSN
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Conference Information
Committee
SDM
Conference Date
2018-06-25 - 2018-06-25
Place (in Japanese)
(See Japanese page)
Place (in English)
Nagoya Univ. VBL3F
Topics (in Japanese)
(See Japanese page)
Topics (in English)
Material Science and Process Technology for MOS Devices and Memories
Paper Information
Registration To
SDM
Conference Code
2018-06-SDM
Language
Japanese
Title (in Japanese)
(See Japanese page)
Sub Title (in Japanese)
(See Japanese page)
Title (in English)
Recent progress and problem of Diamond device: Crystal quality of bulk and surface
Sub Title (in English)
Keyword(1)
Keyword(2)
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1st Author's Name
Yukako Kato
1st Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
2nd Author's Name
Kouhei Takizawa
2nd Author's Affiliation
Tokyo City University
(
Tokyo City Univ.
)
3rd Author's Name
Toshiharu Makino
3rd Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
4th Author's Name
Hiromitsu Kato
4th Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
5th Author's Name
Masahiko Ogura
5th Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
6th Author's Name
Daisuke Takeuchi
6th Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
7th Author's Name
Satoshi Yamasaki
7th Author's Affiliation
National Institute of Advance industrial science and technology
(
AIST
)
8th Author's Name
Hiroshi Nohira
8th Author's Affiliation
Tokyo City University
(
Tokyo City Univ.
)
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Speaker
Author-1
Date Time
2018-06-25 14:30:00
Presentation Time
30 minutes
Registration for
SDM
Paper #
Volume (vol)
vol.118
Number (no)
no.110
Page
#Pages
Date of Issue
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